P15.XYZ300S/K-C2 Piezo Nanopostioning Scanners is a threedimensional XYZ axis motion piezo nanopositioning stage. The stroke of each axis can reach 300 microns, and the center has a large aperture, which is very suitable for transmitted light applications.
Characteristics
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Application
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Technical Data | ||||
Type |
P15.XYZ300S-C2 |
P15.XYZ300K-C2 |
Units |
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Active axes |
X、Y、Z |
X、Y、Z |
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Driving channels |
4 driving channels |
4 driving channels |
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Travel(0~120V) |
±120/axis |
±120/axis |
μm±10% |
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Max.travel(0~150V) |
±150/axis |
±150/axis |
μm±10% |
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Sensor |
SGS |
- |
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Aperture |
66×66 |
66×66 |
mm |
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Size |
150×150×35 |
150×150×35 |
mm |
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Resolution |
10 |
5 |
nm |
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Linearity |
0.2 |
- |
%F.S. |
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Closed loop repeatability |
0.15 |
- |
%F.S. |
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Pitch/yaw/roll |
<100 |
<100 |
μrad |
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Stiffness |
1 |
1 |
N/μm±20% |
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Push/pull force |
200/10 |
200/10 |
N |
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Unloaded resonant frequency |
190/145/249 |
190/145/249 |
Hz±20% |
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Resonant frequency @ 300g |
145/110/145 |
145/110/145 |
Hz±20% |
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Load capacity |
Horizontal |
5 |
5 |
kg |
Vertical |
1 | 1 | ||
Inverted |
1 | 1 | ||
El. capacitance |
21.6/axis |
21.6/axis |
μF±20% |
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Material |
Steel, Aluminum |
Steel, Aluminum |
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Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for high-reliability and long-term use.
Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
Diagram |
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Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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