P12B.XYZ100 Low Temperature Vacuum XYZ Piezo StageCurrent Location:Product Homepage >> XYZ Piezo Nanopositioner>>P12B.XYZ100 Low Temperature Vacuum XYZ Piezo Stage
  • Introduction
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Characteristics


 XYZ motion

 100μm/axis travel

 Aperture: Ø10mm

  Suitable for vacuum application


XYZ motion

Travel vs Voltage

Linearity

    Technical Data

Type

P12B.XYZ100S
P12B.XYZ100K

Units

Active axes

X、Y、Z
X、Y、Z


Drive control

3 driving channels 3 sensing channels
3 driving channels


Travel range(0~150V)

100/axis
100/axis

μm±20%

Sensor

SGS
-


Resolution

3
1

nm

Aperture

Ø10
Ø10

mm

El. capacitance

3.6/axis
3.6/axis

μF±10%

Unloaded resonant frequency

0.03
0.03

kHz±20%

Load capacity

Horizontal
0.2
0.2

kg

Vertical
0.03 0.03
Inverted
0.03 0.03

Mass

250
250

g±5%

Material

Steel, Aluminum
Steel, Aluminum


Note: Above are measured using E00/E01piezo controller. The maximum driving voltage can be -20V~150V; Recommended 0~120V for high-reliability and long-term use.


Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawing (Click on the picture to enlarge it)
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual


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