P12B.XYZ100 Low Temperature Vacuum XYZ Piezo StageCurrent Location：Product Homepage >> XYZ Piezo Nanopositioner>>P12B.XYZ100 Low Temperature Vacuum XYZ Piezo Stage

Introduction
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Characteristics

XYZ motion

100μm/axis travel

Aperture: Ø10mm

Suitable for vacuum application

XYZ motion

Travel vs Voltage

Linearity

Technical Data
Type	P12B.XYZ100S	P12B.XYZ100K	Units
Active axes	X、Y、Z	X、Y、Z
Drive control	3 driving channels 3 sensing channels	3 driving channels
Travel range(0~150V)	100/axis	100/axis	μm±20%
Sensor	SGS	-
Resolution	3	1	nm
Aperture	Ø10	Ø10	mm
El. capacitance	3.6/axis	3.6/axis	μF±10%
Unloaded resonant frequency	0.03	0.03	kHz±20%
Load capacity	200	200	g
Mass	250	250	g±5%
Material	Steel, Aluminum	Steel, Aluminum

Note: Above are measured using E00/E01piezo controller. The maximum driving voltage can be -20V~150V; Recommended 0~120V for high-reliability and long-term use.

Drawing (Click on the picture to enlarge it)

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Piezo · Nano · Motion