P12.XY500Z800S/K Piezoelectric Scanning StageCurrent Location：Product Homepage >> XYZ Piezo Nanopositioner>>P12.XY500Z800S/K Piezoelectric Scanning Stage
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Characteristics


 XYZ linear motion

 XY travel to 500μm, Z travel to 800μm

 For objective XYZ positioning adjustment

 Vacuum version available

    Technical Data

Type

P12.XY500Z800S

P12.XY500Z800K

Units

Active axes

X、Y、Z

X、Y、Z

 

Drive control

3 driving channels 3 sensing channels

3 driving channels

 

XY Travel range(0~150V)

500

500

μm/axis±10%

Z Travel range(0~150V)

800

800

μm±10%

Integrated sensor

SGS

-

 

Load capacity

250

250

g

XY capacitance

28.8

28.8

μF/axis±20%

Z capacitance

43.2

43.2

μF±20%

XY resolution

14

4

nm

Z resolution

22

6.5

nm

Mass

1000(with no cable)

1000(with no cable)

g±5%

Note: Above are measured using E00/E01 piezo controllers. The maximum driving voltage can be -20V~150V; Recommended 0~120V for high-reliability and long-term use.

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