- Introduction
- Feedback
Characteristics
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| Technical Data | ||||
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Type |
P12.XY500Z800S |
P12.XY500Z800K |
Units |
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Active axes |
X、Y、Z |
X、Y、Z |
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Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
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XY Travel range(0~150V) |
500 |
500 |
μm/axis±10% |
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Z Travel range(0~150V) |
800 |
800 |
μm±10% |
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Integrated sensor |
SGS |
- |
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XY resolution |
14 |
4 |
nm |
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Z resolution |
22 |
6.5 |
nm |
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Load capacity |
Horizontal |
0.02 |
0.02 |
kg |
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Vertical |
0.02 | 0.02 | ||
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Inverted |
0.25 | 0.25 | ||
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XY capacitance |
28.8 |
28.8 |
μF/axis±20% |
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Z capacitance |
43.2 |
43.2 |
μF±20% |
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Mass |
1000(with no cable) |
1000(with no cable) |
g±5% |
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Note: Above are measured using E00/E01 piezo controllers. The maximum driving voltage can be -20V~150V; Recommended 0~120V for high-reliability and long-term use.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
