P15.XY100S/K-B1 piezo nanopositioning stage moves in XY axes, features 100μm/axis travel and very low profile, and SGS sensor is available for high accuracy. Vacuum suction cup can be installed on it.
Characteristics
XY motion |
Travel to 100μm/axis |
Load capacity to 500g |
Very low profile |
Optional sensor |
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Applications
Surface inspection |
Microscopy imaging |
Laser technology |
Semiconductor processing and test |
Technical Data | |||
Types |
P15.XY100S-B1 |
P15.XY100K-B1 |
Units |
Active axes |
X、Y |
X、Y |
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Drive control |
2 driving channels 2 sensing channels |
2 driving channels |
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Nominal travel(0~120V) |
80 |
80 |
μm±10% |
Travel(0~150V) |
100 |
100 |
μm±10% |
Sensor type |
SGS |
- |
|
Resolution |
3 |
1 |
nm |
Linearity |
0.15 |
- |
%F.S. |
Repeatability |
0.05 |
- |
%F.S. |
Pitch/yaw/roll |
≤10 |
≤10 |
μrad |
Unloaded resonant frequency |
490 |
490 |
Hz±20% |
Unloaded step time |
50 |
20 |
ms±20% |
Load capacity |
500 |
500 |
g |
El.capacitance |
14.5 |
14.5 |
μF±10% |
Material |
Al |
Al |
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Cable length |
1.5 |
1.5 |
m±10mm |
Mass |
730 |
730 |
g±5% |
Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for highreliability and long-term use.
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