P15.XY100S/K piezo nanopositioning stage moves in XY axes, features 100μm/axis travel and very low profile, and SGS sensor is available for high accuracy. Vacuum suction cup can be installed on it.
Characteristics
XY motion |
Travel to 100μm/axis |
Load capacity to 500g |
Very low profile |
Optional sensor |
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Applications
Surface inspection |
Microscopy imaging |
Laser technology |
Semiconductor processing and test |
Technical Data | ||||
Types |
P15.XY100S |
P15.XY100K |
Units |
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Active axes |
X、Y |
X、Y |
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Drive control |
2 driving channels 2 sensing channels |
2 driving channels |
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Nominal travel(0~120V) |
80 |
80 |
μm±10% |
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Max.travel(0~150V) |
100 |
100 |
μm±10% |
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Sensor type |
SGS |
- |
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Resolution |
3 |
1 |
nm |
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Linearity |
0.15 |
- |
%F.S. |
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Repeatability |
0.05 |
- |
%F.S. |
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Pitch/yaw/roll |
≤10 |
≤10 |
μrad |
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Unloaded resonant frequency |
490 |
490 |
Hz±20% |
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Unloaded step time |
50 |
20 |
ms±20% |
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Load capacity |
Horizontal |
0.5 |
0.5 |
kg |
Vertical |
0.08 | 0.08 | ||
Inverted |
0.5 | 0.5 | ||
El.capacitance |
14.5 |
14.5 |
μF±10% |
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Material |
Al |
Al |
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Cable length |
1.5 |
1.5 |
m±10mm |
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Mass |
730 |
730 |
g±5% |
Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for highreliability and long-term use.
Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
Diagram |
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Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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