P15.XY100S/K Piezo Nanopositioning StageCurrent Location:Product Homepage >> XY Piezo Nanopositioner>>P15.XY100S/K Piezo Nanopositioning Stage
  • Introduction
  • Feedback

P15.XY100S/K piezo nanopositioning stage moves in XY axes, features 100μm/axis travel and very low profile, and SGS sensor is available for high accuracy. Vacuum suction cup can be installed on it.


Characteristics


 XY motion

 Travel to 100μm/axis

 Load capacity to 500g

 Very low profile

 Optional sensor

 

 

 


Travel vs Voltage Curve

Linearity


Applications


 Surface inspection

 Microscopy imaging

 Laser technology

 Semiconductor processing and test

    Technical Data

Types

P15.XY100S

P15.XY100K

Units

Active axes

X、Y

X、Y

 

Drive control

2 driving channels 2 sensing channels

2 driving channels

 

Nominal travel(0~120V)

80

80

μm±10%

Max.travel(0~150V)

100

100

μm±10%

Sensor type

SGS

-

 

Resolution

3

1

nm

Linearity

0.15

-

%F.S.

Repeatability

0.05

-

%F.S.

Pitch/yaw/roll

≤10

≤10

μrad

Unloaded resonant frequency

490

490

Hz±20%

Unloaded step time

50

20

ms±20%

Load capacity

Horizontal

0.5

0.5

kg

Vertical
0.08 0.08
Inverted
0.5 0.5

El.capacitance

14.5

14.5

μF±10%

Material

Al

Al

 

Cable length

1.5

1.5

m±10mm

Mass

730

730

g±5%

Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for highreliability and long-term use.


Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawings(Click on the picture to enlarge it)
Click on the picture to enlarge it
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual

     3D diagram presentation

  • Client:
    Distributor End User
  • Customer type:
    Corporation University Institute
  • Name of your Company/organication:
  • Company Location:
  • Your Contact Information:
  • Your Name:
  • Phone Number:
  • Tel:
  • E-mail:
  • Postcode:
  • (Please make sure you have given the authentic and effective contact info for us to feedback.)
  • Products:
  • Model:
  • Problem:
    Performance Appearance Software Accessories/Parts
  • Description of the Feedback:
  • auth code: Can't see clearly?

WeChat

Sweep, get the latest information on core tomorrow

Address:1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China

Tel:0451-86268790

Piezo · Nano · Motion

Copyright@ CoreMorrow Ltd. 黑ICP备16009173号-1