P15.XY100S/K-B1 Piezo Nanopositioning StageCurrent Location:Product Homepage >> XY Piezo Nanopositioner>>P15.XY100S/K-B1 Piezo Nanopositioning Stage
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P15.XY100S/K-B1 piezo nanopositioning stage moves in XY axes, features 100μm/axis travel and very low profile, and SGS sensor is available for high accuracy. Vacuum suction cup can be installed on it.


Characteristics


 XY motion

 Travel to 100μm/axis

 Load capacity to 500g

 Very low profile

 Optional sensor

 

 

 


Travel vs Voltage Curve

Linearity


Applications


 Surface inspection

 Microscopy imaging

 Laser technology

 Semiconductor processing and test

    Technical Data

Types

P15.XY100S-B1

P15.XY100K-B1

Units

Active axes

X、Y

X、Y

 

Drive control

2 driving channels 2 sensing channels

2 driving channels

 

Nominal travel(0~120V)

80

80

μm±10%

Travel(0~150V)

100

100

μm±10%

Sensor type

SGS

-

 

Resolution

3

1

nm

Linearity

0.15

-

%F.S.

Repeatability

0.05

-

%F.S.

Pitch/yaw/roll

≤10

≤10

μrad

Unloaded resonant frequency

490

490

Hz±20%

Unloaded step time

50

20

ms±20%

Load capacity

500

500

g

El.capacitance

14.5

14.5

μF±10%

Material

Al

Al

 

Cable length

1.5

1.5

m±10mm

Mass

730

730

g±5%

Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for highreliability and long-term use.

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    Downloads
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Manual

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