P12A Piezo Nanopositioning Scanners Travel to 200、400、600μmCurrent Location：Product Homepage >> X/Z Piezo Nanopositioner>>P12A Piezo Nanopositioning Scanners Travel to 200、400、600μm

Introduction
Feedback

Characteristics

1 to 3 axes motion version for choice	Travel to 600μm in one single axis	Travel to 200μm/axis for multiple axes version
Optional closed-loop sensor	Aperture of 45×45mm

Applications

Scanning microscopy	Confocal microscopy	Surface measurement	Semiconductor test
Wafer positioning	Image processing and stabilization

Technical Data
Type	S-Closed loop 尾缀K-开环	P12A.X200S P12A.X200K	P12A.Z200S P12A.Z200K	P12A.Z400S P12A.Z400K	P12A.Z600S P12A.Z600K	P12A.XY200S P12A.XY200K	P12A.XZ200S P12A.XZ200K	P12A.XYZ200S P12A.XYZ200K	Units
Active axes		X	Z	Z	Z	X、Y	X、Z	X、Y、Z
Drive control		1 driving channels 1sensing channels	1 driving channels 1sensing channels	1 driving channels 1sensing channels	1 driving channels 1sensing channels	2 driving channels 2 sensing channels	2 driving channels 2 sensing channels	3 driving channels 3sensing channels
Nominal travel（0~120V）		160	160	320	480	160/axis	160/axis	160/axis	μm±20%
Travel（0~150V）		200	200	400	600	200/axis	200/axis	200/axis	μm±20%
Sensor type		SGS/-	SGS/-	SGS/-	SGS/-	SGS/-	SGS/-	SGS/-
Resolution		5.5/2	5.5/2	11/3.5	16/5	5.5/2	5.5/2	5.5/2	nm
Linearity		0.3/-	0.3/-	0.4/-	0.5/-	0.4/-	0.4/-	0.5/-	%F.S.
Repeatability		0.2/-	0.2/-	0.3/-	0.4/-	0.3/-	0.3/-	0.4/-	%F.S.
Unloaded resonant frequency		160	160	130	80	X160/Y140	X160/Z140	X150/Y130/Z90	Hz±20%
Load capacity		0.5	0.5	0.4	0.3	0.4	0.4	0.3	kg
El.capacitance		7.2	7.2	14.4	21.6	7.2/axis	7.2/axis	7.2/axis	μF±20%
Material		Steel, Al	Steel, Al	Steel, Al	Steel, Al	Steel, Al	钢、铝	Steel, Al
Auto CAD PDF
Step		/	/		/			/
Specs Sheet

Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for high-reliability and long-term use.

Drawing (Click on the picture to enlarge it)

Downloads
Manual

3D diagram presentation

Client：
Distributor End User
Customer type：
Corporation University Institute
Name of your Company/organication：
Company Location：

Your Contact Information：
Your Name：
Phone Number：
Tel：
E-mail：
Postcode：
(Please make sure you have given the authentic and effective contact info for us to feedback.)
Products：
Model：
Problem：
Performance Appearance Software Accessories/Parts
Description of the Feedback：
auth code： Can't see clearly?

WeChat

Sweep, get the latest information on core tomorrow

Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China

Products

Applications

Services

News

About CoreMorrow

Contact

WeChat

Sweep, get the latest information on core tomorrow

Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China

Tel：0451-86268790

Piezo · Nano · Motion