P12A Piezo Nanopositioning Scanners Travel to 200、400、600μmCurrent Location：Product Homepage >> X/Z Piezo Nanopositioner>>P12A Piezo Nanopositioning Scanners Travel to 200、400、600μm

Introduction
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Characteristics

1 to 3 axes motion version for choice	Travel to 600μm in one single axis	Travel to 200μm/axis for multiple axes version
Optional closed-loop sensor	Aperture of 45×45mm

Applications

Scanning microscopy	Confocal microscopy	Surface measurement	Semiconductor test
Wafer positioning	Image processing and stabilization

Technical Data
Type	S-Closed loop K-Open Loop	P12A.X200S P12A.X200K	P12A.Z200S P12A.Z200K	P12A.Z400S P12A.Z400K	P12A.Z600S P12A.Z600K	P12A.XY200S P12A.XY200K	P12A.XZ200S P12A.XZ200K	P12A.XYZ200S P12A.XYZ200K	Units
Active axes		X	Z	Z	Z	X、Y	X、Z	X、Y、Z
Drive control		1 driving channels 1sensing channels	1 driving channels 1sensing channels	1 driving channels 1sensing channels	1 driving channels 1sensing channels	2 driving channels 2 sensing channels	2 driving channels 2 sensing channels	3 driving channels 3sensing channels
Nominal travel（0~120V）		160	160	320	480	160/axis	160/axis	160/axis	μm±20%
Max.travel（0~150V）		200	200	400	600	200/axis	200/axis	200/axis	μm±20%
Sensor type		SGS/-	SGS/-	SGS/-	SGS/-	SGS/-	SGS/-	SGS/-
Resolution		5.5/2	5.5/2	11/3.5	16/5	5.5/2	5.5/2	5.5/2	nm
Linearity		0.3/-	0.3/-	0.4/-	0.5/-	0.4/-	0.4/-	0.5/-	%F.S.
Repeatability		0.2/-	0.2/-	0.3/-	0.4/-	0.3/-	0.3/-	0.4/-	%F.S.
Unloaded resonant frequency		160	160	130	80	X160/Y140	X160/Z140	X150/Y130/Z90	Hz±20%
Load capacity	Horizontal	0.5	0.5	0.4	0.3	0.4	0.4	0.3	kg
	Vertical	0.03	0.03	0.02	0.01	0.02	0.01	0.01
	Inverted	0.5	0.03	0.02	0.01	0.4	0.02	0.01
El.capacitance		7.2	7.2	14.4	21.6	7.2/axis	7.2/axis	7.2/axis	μF±20%
Material		Steel, Al	Steel, Al	Steel, Al	Steel, Al	Steel, Al	Steel,AI	Steel, Al
Auto CAD PDF
Step		/	/		/			/
Specs Sheet

Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for high-reliability and long-term use.

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawing (Click on the picture to enlarge it)

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3D diagram presentation

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Piezo · Nano · Motion