Characteristics

Z axis motion

Travel to 17μm

Aperture：Ø310mm

Upright/inverted/side stand mounting

Technical data
Models	P77.S310 P77.K310	Units
Active axes	Z
Travel range(0~120V)	13.5	μm±10%
Travel range(0~150V)	17	μm±10%
Sensor	SGS/-
Aperture	Φ310	mm
Resolution	0.5/0.2	nm
Pitch/Yaw/Roll	-	μrad
Push/pull force	100/20	N
Unloaded resonant frequency	1500	Hz±20%
Unloaded Step time	-	ms±20%
Load capacity	Upright 22/Lateral 22/Inverted 22	kg
Electrical capacitance	21.6	μF±20%
Material	Aluminum steel
Mass	4200	g±5%
Operating temperature	-20~80	℃
Control	1~3
Connector	LEMO
Cable length	1.5	m±10mm

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

Drawings（Click on the picture to enlarge it）

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