Characteristics
Piezo drive |
Small size |
Nanometer resolution |
3.5 to 30mm travel optional |
Optional closed-loop version, vacuum version |
|
|
Small Size |
Optional Vacuum |
Optional Sensor |
Optional Multi Axes |
Note: Closed-loop version available with larger size. The closed-loop accuracy is up to ±1μm/m. The frequency is up to 400kHz. Communication via RS-422 port. Operating temperature is 0~55°C. 2-axis or 3-axis motion version available.
Recommended Controller | |||||
MN piezo motor type |
Recommended Controller |
MN piezo motor type |
Recommended Controller | ||
1-axis motion |
Open loop |
2 or 3-axis
motion |
Open loop |
E71.C3K-J |
|
Closed loop |
Closed loop |
E71.D3E-J |
|