MN Linear Piezo MotorCurrent Location:Product Homepage >> Linear Piezo Motors>>MN Linear Piezo Motor
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Characteristics


 Piezo drive

 Small size

 Nanometer resolution

 3.5 to 30mm travel optional

 Optional closed-loop version, vacuum version




Small Size

Optional Vacuum

Optional Sensor

Optional Multi Axes

    Technical Data

Type

MN15-3.5mm

MN15-10mm

MN30-8mm

MN30-18mm

MN30-30mm

Units

Width 

15

22

30

40

52

mm

Height

7

7

12.5

12.5

12.5

mm

Depth

15

15

30

30

30

mm

Travel

3.5

10

8

18

30

mm

Speed

1.5

1.5

1.2

1.2

1.2

mm/s

Mass

6

20

32

38

54

g

Load capacity

Torque Mx

4

4.5

5

5

5

Ncm

Torque My

4

1.5

5

5

5

Ncm

Torque Mz

4

3.2

5

5

5

Ncm

Blocking force Fx

3

3

4.5

4.5

4.5

N

Fy, Fz

20

20

30

30

30

N

Resolution(cal.) 

Single step

~450

-

~450

~450

~450

nm

1/16 step

~30

-

~30

~30

~30

nm

1/64 step

~10

-

~10

~10

~10

nm

1/2 step

~250

-

~250

~250

~250

nm

Double step

~900

-

~900

~900

~900

nm

Guiding accuracy (unloaded)

Yaw angle

20

20

20

20

20

arc sec

Pitch angle

60

60

60

60

60

arc sec

Vertical deviation

1

1

1

1

1

μm

Lateral deviation

2

2

2

2

2

μm

Specs Sheet






 

Note: Closed-loop version available with larger size. The closed-loop accuracy is up to ±1μm/m. The frequency is up to 400kHz. Communication via RS-422 port. Operating temperature is 0~55°C. 2-axis or 3-axis motion version available.

    Recommended Controller

MN piezo motor type

Recommended Controller

MN piezo motor type
Recommended Controller

1-axis motion

Open loop

E53.C1K-J

2 or 3-axis motion
Open loop
E71.C3K-J

Closed loop

E53.D1E-J

Closed loop
E71.D3E-J
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