The N31 series three-axis linear piezo motor can move in XYZ and is equipped with an grating sensor for servo control. It adopts PZT piezo drive and can achieve nanoscale resolution. The stroke for each axis can be selected 25,50,100mm.
Characteristics
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Application
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Technical Data | ||||
Type |
N31.XY50Z25E |
N31.XY50Z100E |
N31.XY100Z25E |
Units |
Active axes |
X、Y、Z |
X、Y、Z |
X、Y、Z |
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Integrated sensor |
grating sensor |
grating sensor |
grating sensor |
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Nominal travel range |
XY:±25 Z:±12.5 |
XY:±25 Z:±50 |
XY:±50 Z:±12.5 |
mm |
Max speed |
2.5 |
2.5 |
2.5 |
μm/s±20% |
Resolution |
80 |
80 |
80 |
nm±20% |
Bidirectional Repeatability |
3 |
3 |
3 |
μm±20% |
Load capacity |
2.5 |
2.5 |
2.5 |
kg |
Operation temperature |
0~40 |
0~40 |
0~40 |
℃ |
Mass(excluding cable) |
4.2 |
4.7 |
5.3 |
kg±5% |
Material |
Al、Steel |
Al、Steel |
Al、Steel |
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Cable length |
1.5 |
1.5 |
1.5 |
m±10mm |
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