Characteristics
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Small Size ![]() |
Optional Vacuum ![]() |
Optional Sensor ![]() |
Optional Multi Axes ![]() |
Note: Closed-loop version available with larger size. The closed-loop accuracy is up to ±1μm/m. The frequency is up to 400kHz. Communication via RS-422 port. Operating temperature is 0~55°C. 2-axis or 3-axis motion version available.
Remark: Mx, My and Mz are the maximum moments of force which can applied to the stage in x,y and z direction. X direction is in the axis of movement and y and z are perpedicular to the x direction.
The bearing forces (Fy and Fz) are the maximum forces which can applied normal from the side(Fy)or from the top (Fz)to the stage without breaking the linear bearing inside the stage.
Recommended Controller | |||||
MN piezo motor type |
Recommended Controller |
MN piezo motor type |
Recommended Controller | ||
1-axis motion |
Open loop |
2 or 3-axis
motion |
Open loop |
E71.C3K-J |
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Closed loop |
Closed loop |
E71.D3E-J |
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