MN Linear Piezo MotorCurrent Location:Product Homepage >> Linear piezo motor>>MN Linear Piezo Motor
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Characteristics


 Piezo drive

 Small size

 Nanometer resolution

 3.5 to 30mm travel optional

 Optional closed-loop version, vacuum version




Small Size

Optional Vacuum

Optional Sensor

Optional Multi Axes

    Technical Data

Type

MN15-3.5mm

MN15-10mm

MN30-8mm

MN30-18mm

MN30-30mm

Units

Width 

15

22

30

40

52

mm

Height

7

7

12.5

12.5

12.5

mm

Depth

15

15

30

30

30

mm

Travel

3.5

10

8

18

30

mm

Speed

1.5

1.5

1.2

1.2

1.2

mm/s

Mass

6

20

32

38

54

g

Load capacity

Torque Mx

4

4.5

5

5

5

Ncm

Torque My

4

1.5

5

5

5

Ncm

Torque Mz

4

3.2

5

5

5

Ncm

Blocking force Fx

3

3

4.5

4.5

4.5

N

Fy, Fz

20

20

30

30

30

N

Resolution(cal.) 

Single step

~450

-

~450

~450

~450

nm

1/16 step

~30

-

~30

~30

~30

nm

1/64 step

~10

-

~10

~10

~10

nm

1/2 step

~250

-

~250

~250

~250

nm

Double step

~900

-

~900

~900

~900

nm

Guiding accuracy (unloaded)

Yaw angle

20

20

20

20

20

arc sec

Pitch angle

60

60

60

60

60

arc sec

Vertical deviation

1

1

1

1

1

μm

Lateral deviation

2

2

2

2

2

μm

Specs Sheet






 

     Note: Closed-loop version available with larger size. The closed-loop accuracy is up to ±1μm/m. The frequency is up to 400kHz. Communication via RS-422 port. Operating temperature is 0~55°C. 2-axis or 3-axis motion version available.

     Remark: Mx, My and Mz are the maximum moments of force which can applied to the stage in x,y and z direction. X direction is in the axis of movement and y and z are perpedicular to the x direction.
     The bearing forces (Fy and Fz) are the maximum forces which can applied normal from the side(Fy)or from the top (Fz)to the stage without breaking the linear bearing inside the stage.

    Recommended Controller

MN piezo motor type

Recommended Controller

MN piezo motor type
Recommended Controller

1-axis motion

Open loop

E53.C1K-J

2 or 3-axis motion
Open loop
E71.C3K-J

Closed loop

E53.D1E-J

Closed loop
E71.D3E-J
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