F21.N2E-B1Z Vacuum Two-axis Piezo Motor StageCurrent Location:Product Homepage >> Linear piezo motor>>F21.N2E-B1Z Vacuum Two-axis Piezo Motor Stage
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    F21.N2E-B1Z is a vacuum two-dimensional motion piezo stage that can perform X-direction linear motion and θx deflection motion. The linear travel of the X-axis can reach 10mm, and the deflection travel of θx can reach 10°. It can carry 600g of samples for motion control. The appearance structure design is compact and the size is small, suitable for various high-precision motion control applications.



Characteristics


 Motion in X and θx

 Linear travel of 10mm, deflection travel of 10°

 High resolution

 Load capacity up to 600g

 Vacuum compatibility





Applications


 Semiconductors

 Sample manipulation by SEM

 AFM

 Wafer processing and inspection

 Probe station

 Laser processing

 Optical path adjustment

 Laser stabilization

 Optical fiber alignment  Optical testing system  Biomedical  Super-resolution imaging sample movement

Recommended Controller


E53.D2E-H

   Technical Data

Type

F21.N2E-B1Z

Units

Active axes

X、θx

 

Integrated sensor Grating sensor

Travel range in X

10 or ±5

mm

Travel range in θx
10 or ±5 °

Speed limit in X

3

mm/s±20%

Speed limit in θx
3 °/s±20%

Resolution in X

5

nm±20%

Resolution in θx
1

μrad±20%

Linearity in X 0.8

μm±20%

Linearity in θx
0.01

°±20%

Repeatability in X  0.1

μm±20%

Repeatability in θx
0.001

°±20%

Load capacity

600

g

Operating temperature

0~40

Mass(not include cable)  200 g±5%
Material Steel, Al

Cable length

0.7

m±10mm

Connector

DB15male


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Step

Specs Sheet
Manual


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