F21.N2E-B1Z is a vacuum two-dimensional motion piezo stage that can perform X-direction linear motion and θx deflection motion. The linear travel of the X-axis can reach 10mm, and the deflection travel of θx can reach 10°. It can carry 600g of samples for motion control. The appearance structure design is compact and the size is small, suitable for various high-precision motion control applications.
Characteristics
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Applications
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Recommended Controller ![]() E53.D2E-H |
Technical Data | ||
Type |
F21.N2E-B1Z |
Units |
Active axes |
X、θx |
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Integrated sensor | Grating sensor |
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Travel range in X |
10 or ±5 |
mm |
Travel range in θx |
10 or ±5 | ° |
Speed limit in X |
3 |
mm/s±20% |
Speed limit in θx |
3 | °/s±20% |
Resolution in X |
5 |
nm±20% |
Resolution in θx |
1 |
μrad±20% |
Linearity in X | 0.8 |
μm±20% |
Linearity in θx |
0.01 |
°±20% |
Repeatability in X | 0.1 |
μm±20% |
Repeatability in θx |
0.001 |
°±20% |
Load capacity |
600 |
g |
Operating temperature |
0~40 |
℃ |
Mass(not include cable) | 200 | g±5% |
Material | Steel, Al |
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Cable length |
0.7 |
m±10mm |
Connector |
DB15male |
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