S21.R3 piezo rotation platform moves in θz, it’s very compact and easy to integrate.

Characteristics

θz rotation	Rotation range to 3mrad	Closed loop for high accuracy	Fast response
Small size

Typical Applications

Optical path adjustment

Interference/Metrology

Beam scanning

Sensor calibration

Technical Data
Type	S21.R3S	S21.R3K	Units
Active axes	θz	θz
Drive control	1 driving channel 1 sensing channel	1 driving channel
Integrated sensor	SGS	-	mrad±20%
Rotation angle(0~120V)）	2.4	2.4	mrad±20%
Rotation angle(0~150V)	3	3	%F.S.
Resolution	0.3	0.3	μrad
Closed-loop linearity	0.3	-	%F.S.
Closed-loop repeatability	0.1	-	%F.S.
Unloaded resonant frequency	700	700	Hz±20%
Resonant frequency@0.5kg load	120	120	Hz±20%
Load capacity	0.5	0.5	kg
El. capacitance	5.4	5.4	μF±20%
Material	Aluminum, Steel	Aluminum, Steel
Mass	1635	1635	g±5%

Drawings（Click on the picture to enlarge it）

Click on the picture to enlarge it
Auto CAD PDF
Step
Specs Sheet
Manual

3D diagram presentation

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