- Introduction
- Feedback
S51.ZT0S/K Piezo Z/Tip/Tilt Platform is one customized piezo stage that tilts in θx, θy and moves in Z. There is a large aperture in its center that is suitable for lighttransmitted applications.
Characteristics
|
|
|
|
|
|
|
|
|
|
θx θy tilt and Z motionApplications
|
|
|
|
|
|
|
|
|
|
| Technical Data | |||
|
Types |
S51.ZT0S |
S51.ZT0K |
Units |
|
Active axes |
θx θy Z |
θx θy Z |
|
|
Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
|
|
Nominal travel in Z(0 ~120V) |
90 |
90 |
μm±10% |
|
Max.travel in Z(0 ~150V) |
110 |
110 |
μm±10% |
|
Nominal travel in θx θy(0~120V) |
±0.32/axis |
±0.32/axis |
mrad±10% |
|
Max.travel in θx θy(0~150V) |
±0.4/axis |
±0.4/axis |
mrad±10% |
|
Sensor type |
SGS |
- |
|
|
Resolution in Z |
10 |
3 |
nm |
|
Resolution in θx θy |
0.25 |
0.1 |
μrad |
|
Closed-loop linearity |
0.05 |
- |
%F.S. |
|
Closed-loop repeatability |
0.03 |
- |
%F.S. |
|
Blocking force in Z |
500 |
500 |
N |
|
Stiffness in Z |
8 |
8 |
N/μm |
|
Unloaded resonant frequency |
230 |
230 |
Hz±20% |
|
Resonant frequency@3kg |
150 |
150 |
Hz±20% |
|
Step Time |
40@3kg |
10 |
ms±20% |
|
Load capacity |
5 |
5 |
kg |
|
El.capacitance |
7.2/axis |
7.2/axis |
μF±20% |
|
Material |
Al, Steel |
Al, Steel |
|
|
Mass |
5 (Cable not included) |
5 (Cable not included) |
kg±5% |
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
