Type

XD503

Units

Active axes

θx、θy

Drive control/span>

3 driving channels, 2 sensing channels

Sensor

SGS

Travel range(0~150V)

±5

mrad±20%

Load capacity

Horizontal 2/Vertical, 0.02/Inverted 0.1 

kg±5%

Open-loop resolution(5mV)

0.1/0.4

μrad±20%

Unloaded resonant frequency

200

Hz±20%

Resonant frequency@2kg load

60

Hz±20%

Linearity

0.2

%F.S.

Repeatability

0.15

%F.S.

Mass(Not include cable)

1.3

kg

El. capacitance

57.6

μF/axis±20%

Material

Aluminium