XD503 Piezo Tip/Tilt StageCurrent Location：Product Homepage >> Piezo Z/Tip/Tilt Stages>>XD503 Piezo Tip/Tilt Stage
Piezo Tip/Tilt Stage
  • Introduction
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Characteristics


 Active axes：θx, θy

 Sensor：SGS

 Linearity：0.2 %F.S.

 Material：Aluminium

    Technical Data

Type

XD503

Units

Active axes

θx、θy

Drive control/span>

3 driving channels 2 sensing channels

Sensor

SGS

Travel range(0~150V)

±5

mrad±20%

Load capacity

Upright 2/Lateral 0.02/Inverted 0.1

kg±5%

Open-loop resolution(5mV)

0.1/0.4

μrad±20%

Unloaded resonant frequency

200

Hz±20%

Resonant frequency@2kg load

60

Hz±20%

Linearity

0.2

%F.S.

Repeatability

0.15

%F.S.

Mass(Not include cable)

1.3

kg

El. capacitance

57.6

μF/axis±20%

Material

Aluminium


    Drawings（Click on the picture to enlarge it）
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    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual


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