Type

S50.UR1S

S50.UR1K

Units

Active axis

θx θz

θx θz

Drive control

3 driving channels 2 sensing channels

3 driving channels

Tilt angle( 0~120V)

1/axis

1/axis

mrad±10%

Max.tilt angle( 0~150V)

1.3/axis

1.3/axis

mrad±10%

Sensor

SGS

-

Resolution

0.03

0.03

μrad

Linearity

0.2

-

%F.S.

Repeatability

0.07

-

%F.S.

Unloaded resonant frequency, θx/θz

604/726

604/726

Hz±20%

Resonant frequency@20kg load, θx/θz

68/155

68/155

Hz±20%

Unloaded step time

50

20

ms±20%

Load capacity

20

20

kg

El. capacitance, θx/θz

36/44.3

36/44.3

μF±20%

Material

Steel, Aluminum

Steel, Aluminum

Mass

9.5

9.5

kg±5%