Characteristics
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Technical Data | ||||
Type |
S-closed loop |
S34.T2SY |
S34.T2KY |
Units |
Active axes |
θx θy |
θx θy |
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Drive control |
3 driving channels 2 sensing channels |
3 driving channels |
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Tilt angle(0~120V) |
0.8(≈ 165") |
0.8(≈ 165") |
mrad±10% |
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Max.Tilt angle(0~150V) |
1(≈ 200") |
1(≈ 200") |
mrad±10% |
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Integrated sensor |
SGS |
- |
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Resolution |
0.05(≈0.01″) |
0.02(<0.01″) |
μrad |
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Linearity |
0.5 |
- |
%F.S. |
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Repeatability |
0.2 |
- |
%F.S. |
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Unloaded resonant frequency |
2800 |
2800 |
Hz±20% |
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Resonant frequency@500g |
600 |
600 |
Hz±20% |
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Step Time |
5 |
3 |
ms±20% |
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El. capacitance |
14.5 |
14.5 |
μF±20% |
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Material |
Steel, Aluminum |
Steel, Aluminum |
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Mass |
2000 |
2000 |
g±5% |
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