Characteristics
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Technical data | |||||
Types |
S-closed loop K-open loop |
P35A.T40S |
P35A.T35S P35A.T35K |
P35A.U1S |
Units |
Active axes |
θx θy |
θx θy |
θx |
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Drive control |
3 driving channels 2 sensing channels |
3 driving channels |
2 driving channels
1 sensing channel
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Nominal tilt angle(0~120V) |
±17.5/axis(≈±3610″) |
±14.8/axis(≈±3053″) |
±0.60(≈124″) |
mrad±20% |
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Max.tilt angle(0~150V) |
±21.5/axis(≈±4435″) |
±18.5/axis(≈±3816″) |
±0.75(≈155″) |
mrad±20% |
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Integrated sensor |
SGS/- |
SGS/- |
SGS/- |
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Resolution |
1.2(≈0.24″)/0.4(≈0.08″) |
1.2(≈0.24″)/0.4(≈0.08″) |
1.2(≈0.24″)/0.4(≈0.08″) |
μrad |
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Linearity |
0.05/- |
0.13/- |
0.15/- |
%F.S. |
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Repeatability |
0.02/- |
θx0.05/θy0.025/- |
0.1/- |
%F.S. |
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Unloaded resonant frequency |
1300 |
2000 |
5400 |
Hz±20% |
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loaded resonant frequency |
1050(@Φ12.7×3mm mirror) |
1800@Φ12.7×3mm mirror |
550@350g |
Hz±20% |
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Closed-loop operating frequency(-3dB) |
50(@12.7×3mm mirror) |
- |
200@200μrad/- |
Hz±20% |
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step time |
1.4/- |
7@Φ12.7×3mm mirror |
2.5@200μrad, 300g/1.5 |
ms±20% |
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El. capacitance |
7.2/axis |
7.2/axis |
28.8 |
μF±20% |
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Material |
Ti |
Ti, Al |
Invar, Al |
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Mass |
223 |
155 |
1050 |
g±5% |
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