Characteristics
θx, θy tilt |
Max tilt angle to 43mrad |
Closed-loop resolution to 1.2μrad |
Optional sensor |
Technical data | ||||
Types |
S-closed loop K-open loop |
P35A.T40S |
P35A.T40K |
Units |
Active axes |
θx θy |
θx θy |
|
|
Drive control |
3 driving channels 2 sensing channels |
3 driving channels |
|
|
Tilt angle(0~120V) |
35(≈7219″) |
35(≈7219″) |
mrad±10% |
|
Tilt angle(0~150V) |
43((≈8869″) |
43(≈8869″) |
mrad±10% |
|
Integrated sensor |
SGS |
- |
|
|
Resolution |
1.2(≈0.25″) |
0.4(≈0.08″) |
μrad |
|
Linearity |
0.05 |
- |
%F.S. |
|
Repeatability |
0.02 |
- |
%F.S. |
|
Unloaded resonant frequency |
1300 |
1300 |
|
|
Resonant frequency@12.7×3mm mirror |
1050 |
1050 |
Hz±20% |
|
Closed-loop operating frequency(-3dB) |
50(@12.7×3mm mirror) |
- |
Hz±20% |
|
Unload step time |
1.4 |
1 |
ms±20% |
|
El. capacitance |
7.2 |
7.2 |
μF±20% |
|
Material |
Titanium |
Titanium |
|
|
Mass |
223 |
223 |
g |
|
|
|