Characteristics
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Technical Data | ||
Type |
S33.T1SYH |
Units |
Active axes |
θx、θy |
|
Drive control |
3 driving channels |
|
Nominal tilt angle(0~100V) |
1/±0.5(≈±103″) |
mrad±10% |
MAX.tilt angle(0~120V) |
1.3/±0.65(≈±134″) |
mrad±10% |
Integrated sensor |
SGS |
|
Resolution |
0.03(<0.01″) |
μrad |
Linearity | 0.3 |
%F.S. |
Repeatability | 0.1 |
%F.S. |
Unloaded resonant frequency |
7 |
kHz±20% |
El.capacitance |
1.6/axis |
μF±20% |
Material |
Steel, Copper alloy |
|
Mass(including wires) |
52 |
g±5% |
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