Characteristics

XZ movement

8 μm/axis travel

Load capacity up to 80kg

0~1000V drive

Technical Data
Type		XD604.XZ8S	XD604.XZ8K	Units
Active axes		X、Z	X、Z
Drive control		2 driving channels 2 sensing channels	2 driving channels
Travel range in X(0~1000V)		8	8	μm±10%
Travel range in Z(0~1000V)		8	8	μm±10%
Sensor		SGS	-
Resolution		0.5	0.1	nm
Linearity		0.19	0.19	%F.S.
Repeatability		0.13	0.13	%F.S.
Unloaded resonant frequency		560	560	Hz±20%
Resonant frequency@80kg load		340	340	Hz±20%
Resonant frequency@80kg load & 200nm travel		20	20	Hz±20%
Load step time		15	15	ms±20%
El. capacitance		X0.44/Z1.33	X0.44/Z1.33	μF±20%
Material		Steel, Aluminum	Steel, Aluminum
Load capacity	Horizontal	80	80	kg
	Vertical	10	10
	Inverted	10	10
Mass		63	63	kg±5%
Cable lenght		1.5	1.5	m±10mm

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawings（Click on the picture to enlarge it）

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