Type

XD604.XZ8S

XD604.XZ8K

Units

Active axes

X、Z

X、Z

Drive control

2 driving channels 2 sensing channels

2 driving channels

Travel range in X(0~1000V)

8

8

μm±10%

Travel range in Z(0~1000V)

8

8

μm±10%

Sensor

SGS

-

Resolution

0.5

0.1

nm

Linearity

0.19

0.19

%F.S.

Repeatability

0.13

0.13

%F.S.

Unloaded resonant frequency

560

560

Hz±20%

Resonant frequency@80kg load

340

340

Hz±20%

Resonant frequency@80kg load & 
200nm travel

20

20

Hz±20%

Load step time

15

15

ms±20%

El. capacitance

X0.44/Z1.33

X0.44/Z1.33

μF±20%

Material

Steel, Aluminum

Steel, Aluminum

Load capacity

80

80

kg

Mass

63

63

kg±5%

Cable lenght

1.5

1.5

m±10mm