Characteristics

Open/closed loop

UHV version is available

Optional 60μm displacement

Load to 4kg

Technical Data
Type	S-Closed loop K-Open loop	P66.XY60S P66.XY60K	Units
Active axes		X、Y
Drive control		2 driving channels 2 sensing channels
Travel range(0~120V)		48/axis	μm±10%
Max.travel range(0~150V)		60/axis	μm±10%
Sensor		SGS/-
Closed/open loop resolution		2/0.5	nm
Closed-loop linearity		0.15/-	%F.S.
Repeatability		0.1/-	%F.S.
Pitch/yaw/roll		<20	μrad
Push/pull force capacity		120/12	N
Stiffness in motion direction		2.1	N/μm±20%
Unloaded resonant frequency		X0.9/Y1.2	kHz±20%
Closed/open-loop unloaded step time		20/1.6	ms±20%
Load capacity	Horizontal	4	kg
	Vertical	0.1
	Inverted	4
El. capacitance		7.2/axis	μF±20%
Material		Aluminum
Mass		450	g±5%

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawings（Click on the picture to enlarge it）

3D diagram presentation

Your Contact Information：
Your Name：
Phone Number：
Tel：
E-mail：
Postcode：
(Please make sure you have given the authentic and effective contact info for us to feedback.)
Products：
Model：
Problem：
Performance Appearance Software Accessories/Parts
Description of the Feedback：
auth code： Can't see clearly?

WeChat

Sweep, get the latest information on core tomorrow