Type 

P60.Z250S

P60.Z250K

Units

Active axes

Z

Z

Drive control

1 driving channel 1 sensing channel

1 driving channel

Travel range(0~120V)

200

200

µm±10%

Travel range(0~150V)

250

250

µm±10%

Sensor

SGS

-

Resolution

7

2

nm

Linearity

0.4

-

%F.S.

Repeatability

0.1

-

%F.S.

Unloaded resonant frequency

260

260

Hz±20%

Load capacity

1

1

kg

El. capacitance

21.6

21.6

μF±20%

Material

Steel, Aluminum

Steel, Aluminum

Mass(with no cable)

0.4

0.4

kg±20%

Vacuum

1×10^(-5)

1×10^(-5)

mbar