P66.X90 Piezo Nanopositioning Stage (CAP Sensor)Current Location：Product Homepage >> X/Z Piezo Nanopositioner>>P66.X90 Piezo Nanopositioning Stage (CAP Sensor)

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P66.X90 is an X-axis piezo nanopositioning stage, with a displacement up to 95μm. Its closed-loop version integrates CAP sensors to detect and feedback the position in real time, with E53.D1C-H piezo controller developed by CoreMorrow, and it can achieve higher precision motion control.

Characteristics

X motion

Optional horizontal, vertical, inverted mounting

Nanoscale resolution

Optional CAP sensor

Recommended Controllers

E53.D1C-H

Technical Data
Type	C-Closed loop K-Open loop	P66.X90C	P66.X90K	Units
Active axes		X	X
Drive control		1 driving channel 1 sensing channel	1 driving channel
Nominal travel range(0~120V)		76	76	µm±10%
Max.travel range(0~150V)		95	95	µm±10%
Sensor type		CAP	-
Resolution		3	1	nm
Linearity		0.021	-	%F.S.
Repeatability		0.005	-	%F.S.
Unloaded resonant frequency		615	615	Hz±20%
Resonant frequency@5kg		310	310	Hz±20%
Step time@5kg		8@20μm	6	ms±20%
Load capacity	Horizontal	10	10	kg
	Vertical	0.05 or 5*	0.05 or 5*
	Inverted	10	10
El. capacitance		37	37	μF±20%
Material		AI	AI
Mass(Cable included)		5.7	5.7	kg±5%

Note：When installed vertically, the load capacity depends on the specific installation direction.

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawing （Click on the picture to enlarge it）

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Piezo · Nano · Motion