- Introduction
- Feedback
P66.X90 is an X-axis piezo nanopositioning stage, with a displacement up to 95μm. Its closed-loop version integrates CAP sensors to detect and feedback the position in real time, with E53.D1C-H piezo controller developed by CoreMorrow, and it can achieve higher precision motion control.
Characteristics
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Recommended Controllers  E53.D1C-H
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| Technical Data | ||||
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Type |
C-Closed loop
K-Open loop |
P66.X90C |
P66.X90K |
Units |
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Active axes |
X |
X |
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Drive control |
1 driving channel |
1 driving channel |
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Nominal travel range(0~120V) |
76 |
76 |
µm±10% |
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Max.travel range(0~150V) |
95 |
95 |
µm±10% |
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Sensor type |
CAP |
- |
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Resolution |
3 |
1 |
nm |
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Linearity |
0.021 |
- |
%F.S. |
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Repeatability |
0.005 |
- |
%F.S. |
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Unloaded resonant frequency |
615 |
615 |
Hz±20% |
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Resonant frequency@5kg |
310 |
310 |
Hz±20% |
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Step time@5kg |
8@20μm |
6 |
ms±20% |
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Load capacity |
Horizontal |
10 |
10 |
kg |
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Vertical |
5 |
5 |
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Inverted |
10 |
10 |
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El. capacitance |
37 |
37 |
μF±20% |
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| Material | AI | AI |
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Mass(Cable included) |
5.7 |
5.7 |
kg±5% |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
