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CoreMorrow Self-Developed Ultra - Precision Capacitance Micrometer Officially on

Update time：2022-10-09 09:53:02Clicks：1090second
With the rapid development of science, technology and industry, the resolution, accuracy and stability of precision measuring instruments are required to be higher and higher. As a non-contact precision measuring instrument, ultra-precision capacitance micrometer has many advantages such as good temperature stability, high measuring accuracy, good dynamic response, simple structure, good stability and reliability, easy to use, and can realize non-contact measurement. At present, capacitance micrometer is widely used in aerospace, aviation, automobile, machine tool, optical device processing, semiconductor and other industrial measurement and control fields, mainly used to measure the thickness of films of various media, metal deformation, small displacement, small aperture and shape error of various sections. 
As the leader of high-precision motion control system, and in order to meet the requirements of various industries for the realization and detection of nanoscale displacement, we developed and designed the capacitance sensor, now the product is officially on sale!

自研超精密电容式传感器



Advantages of Capacitance Micrometer


Good Stability


The capacitance value of capacitance sensor is usually independent of the electrode material, and the dielectric loss is small, the heat itself is small, so the stability is very good.

Simple Structure and Strong Adaptability


The capacitance sensor has a simple structure, which can measure either conductor or semiconductor even in harsh environment. It is compact and suitable for applications in space-constrained environments, and also work in high and low temperature, strong radiation and strong magnetic field and other harsh environment. Magnetic parts can also be measured.

Good Dynamic Response


The capacitance sensor can perform vibration measurements at kilohertz and the resolution can be up to tens of nanometers operating above kilohertz.

Non-contact Measurement


Capacitance sensor adopts non-contact measurement, which will not cause surface friction and other effects on the tested parts.
In addition to the above advantages, the electrostatic attraction between the electrode plate is very small, so the capacitance sensor input energy is very small, especially suitable for low energy input measurement, such as the measurement of very low pressure, force and very small acceleration, displacement. With very high resolution, it can feel nano or even sub-nano displacement.


Principle

The capacitance sensor is based on the principle of an ideal parallel plate capacitor. Air is used as the medium, the sensor and the measured target on the opposite side form two electrodes. If the edge effect is ignored, the capacitance of the plate capacitor is:

电容式传感器工作原理

In the formula, “ε” is the dielectric constant of the inter electrode medium, “A” is the effective area covered by the two electrode plates, and “h” is the distance between the two electrodes.

电容式传感器工作原理


The up and down displacement (h changes) or left and right displacement (A changes) of the  object under test will cause the change of capacitance. This change of capacitance can be converted into electrical signal output such as voltage, current or frequency by measuring circuit. According to the output signal, the size of the moving object displacement can be measured, so as to realize the measurement of micro displacement, micro size and vibration.
Therefore, if the change of the measured quantities “h”, “A”, “ε”, either of three parameters change will cause the electric capacity. If the two of them unchanged, and just change one of the parameters, it can be converted into the change of capacitance, and then be converted into voltage output by measuring circuit.


CoreMorrow Capacitance Micrometer

CoreMorrow focuses on the research and development, production and sales of nano - scale precision positioning products. We provide precision positioning technology solutions and serialized products for domestic and foreign customers, to achieve sub-nanometer resolution and nanometer positioning accuracy. At present, capacitance sensors designed and developed can be applied to piezoelectric nanopositioning products, and a series of capacitance micrometer products are also available.

电容测微仪


CoreMorrow capacitance sensor is based on the principle of an ideal parallel plate capacitor. The sensor and the measured target on the opposite side form two electrodes. The principle of guard ring capacitor is used to ensure that the sensor is still linear when measuring.

芯明天电容传感器基于平行板电容器原理


E09.Cap capacitance non-contact micrometer can measure the small displacement in the range of 0~500μm through the capacitance probe, the measurement accuracy is nanometer level. The micrometer is composed of a chassis and a sensing module, which can form a multi-channel measurement.


Module Combination

The sensor signal acquisition module of CoreMorrow capacitance sensor adopts modular design, each module corresponds to a capacitance sensor, and carries out one-to-one calibration.

芯明天电容式传感器的传感信号采集模块



E09.CAP Sensor Signal Acquisition Module

The sensor signal acquisition module is integrated into E01 or E00 chassis. The E01 chassis supports up to six E09.CAP sensor signal collection modules, and the E00 chassis supports 12 E09.CAP sensor signal collection modules.

E01或E00机箱

Therefore, the standard capacitance micrometer products can be selected from 1 to 12 channels and are suitable for applications where bulk capacitance sensors are used for measurement, such as lithography.

电容式测微仪可选择1至12通道



Capacitance probe

The probe of this capacitance sensor is small in size, with an outer diameter of only φ10mm and a height of 18.5mm. The minimum diameter of the target to be measured is 10mm, which is a non-contact measurement.

电容测头


Technical Data

The basic technical parameters of E09.CAP capacitance sensor are as follows:

Model

E09.CAP100

E09.CAP200

E09.CAP500

Measuring range

0~100μm

0~200μm

0~500μm

Static resolution

1.25nm

2.5nm

5nm

Bandwidth

2kHz（-3dB）

2kHz（-3dB）

2kHz（-3dB）

Linearity

0.05%

0.05%

0.05%

Repeatability

0.0025%

0.0025%

0.0025%

Note: For more details and prices, please contact our regional sales manager.



Typical Application

The high precision of capacitance sensor makes it widely used in vibration detection, amplitude detection, deformation detection, precision manufacturing, size detection, size screening, displacement detection, insulator thickness detection, material detection and so on.

电容测微仪典型应用



Conclusion

Ultra-precision capacitance micrometer is a non-contact instrument for precision measurement of small displacement and vibration, which has the advantages of good temperature stability, high measurement accuracy, good dynamic response and simple structure.
The promotion of capacitance sensor enriched CoreMorrow product category, which represents another big step forward. In the future, CoreMorrow will continue to do more research and development to provide better, more refined, smaller nano motion and detection products for our valued users! 
If you have requirements for capacitance sensor applications and customized measuring equipment, please contact us for further communication and understanding.
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