Advantages of Capacitance Micrometer
Good Stability
Simple Structure and Strong Adaptability
Good Dynamic Response
Non-contact Measurement
Principle
CoreMorrow Capacitance Micrometer
Module Combination
E09.CAP Sensor Signal Acquisition Module
Therefore, the standard capacitance micrometer products can be selected from 1 to 12 channels and are suitable for applications where bulk capacitance sensors are used for measurement, such as lithography.
Capacitance probe
Technical Data
Model |
E09.CAP100 |
E09.CAP200 |
E09.CAP500 |
Measuring range |
0~100μm |
0~200μm |
0~500μm |
Static resolution |
1.25nm |
2.5nm |
5nm |
Bandwidth |
2kHz(-3dB) |
2kHz(-3dB) |
2kHz(-3dB) |
Linearity |
0.05% |
0.05% |
0.05% |
Repeatability |
0.0025% |
0.0025% |
0.0025% |
Note: For more details and prices, please contact our regional sales manager.
Typical Application
Conclusion