• θx, θy deflection, Z axis up and down
• Center through hole: Ø10mm
• Z-direction stroke 10μm
• The deflection angle can reach 1.5mrad/axis
• Excellent temperature stability

• Image processing and stabilization
• Laser scanning/beam deflection
• Active and adaptive optics
• Optical filter
• Stable beam

Model: S23.ZT1K
Motion type: θx, θy, Z
θx, θy deflection angle (0~120V): 1.2mrad (≈240")
Z-direction linear travel (0~120V): 8μm
θx, θy deflection angle (0~150V): 1.5mrad (≈300")
Z-direction linear travel (0~150V): 10μm
θx, θy deflection resolution: 0.02μrad (<0.01")
Z-direction displacement resolution: 0.1nm
No-load resonance frequency: θx6.9/θy6.9/Z16.5kHz
No-load step time: 0.5ms
Electrostatic capacity: 0.5μF/axis
Material: Steel
Weight: 80g