Features
• Stroke up to 50μm
• Load capacity 500g
• Millisecond response time
• Closed loop repeat positioning accuracy is high
• Excellent focus stability
Large load high frequency response high resolution
Closed loop step time
P76.Z50S/KA piezo objectives canner is loaded with 500g, and the full stroke step time is about 20ms.
Parameter
Model: P76.Z50S/KA
Active axis: Z
Travel range(0~120V): 40μm
Travel range(0~150V): 50μm
Closed loop sensor: SGS
Closed/open loop resolution: 5/2.5nm
Closed loop linearity: 0.05%F.S.
Closed loop repeatability: 0.02%F.S.
Push/pull force: 35/10N
Stiffness: 0.8N/μm
Unload resonant frequency: 800Hz
Closed /open loop unload step time: 5/2ms
Load capacity: 0.5kg
Capacitance: 3.2μF
Material: Steel, aluminum
Mass: 510g