High Resolution, Stability and Dynamics
Technical data
Model: P32.ZT4
Active axis: θx θy Z
θx θy tilt angle(0~120V): 5mrad(≈1030”)
Z linear travel(0~120V): 30μm
θx θy tilt angle(0~150V): 6mrad(≈1230”)
Z linear travel(0~150V): 37.5μm
Closed loop sensor: SGS
Closed /open loop θx θy tilt resolution: 0.1μrad(≈0.02”)/0.05μrad(≈0.01”)
Closed /open loop Z linear resolution: 1nm/0.5nm
Closed loop linearity: 0.05%F.S.
Closed loop repeatability: 0.02%F.S.
Unload resonant frequency:(θx θy): 2kHz
Closed/open loop unload step time: 5ms/2ms
Capacitance: 3.6μF/axis
Material: steel
Mass: 350g