P16 piezo stage is famous for its small volume and large displacement. Its external dimensions are only 60×60×20mm. The displacement could be selected 50μm or 100μm. The very small volume and low height provide greater displacement.
P16 XY two-dimensional moving piezo stage has a through hole of φ20mm at the center, which is very suitable for optical applications.
Recently, CoreMorrow has upgraded P16 series, improving the structure and appearance to make it more integrated, and at the same time, the reliability has also been greatly improved.
Installation interface
The load to be carried can be fixed through 4 M3 tapped holes with a distance of 25mm or 4 M2 tapped holes with a distance of 16mm on the moving surface. The mechanical interface is convenient for installation.
Driving principle
P16 piezo stage is a special motion stage. It uses differential driving control. Although it is two-dimensional motion, it requires a three-channel piezo controller with constant voltage to drive. This is because each axis inside it the movements are driven by two sets of piezo stack differential drives, as shown in the figure below.
Instructions for use / displacement curve
Due to the differential driving, the open / closed-loop displacement curve of P16 piezo stage is slightly different from that of the non-differential driven piezo stage. Taking the driving voltage of 150V as an example, the relationship between the closed-loop displacement in the X-axis direction and the control voltage is shown in the figure below. The displacement & voltage curve in the Y-axis direction is the same as the X-axis.
As can be seen from the figure above, when the control voltage is 75V, the position of the moving will return to the initial position before the voltage is applied.
Technical data
Type: P16.XY100S/K
Axis: X Y
Travel range: 80 or ±40μm/axis@120V
Travel range: 100 or ±50μm/axis@150V
Sensor:SGS
Aperture:φ20mm
Closed/open loop resolution:10/5nm
Closed loop linearity:0.4%F.S.
Closed loop repeatability: 0.1%F.S.
Pitch/Yaw/Roll: <25μrad
Push/Pull force: 30N
Stiffness: 0.5N/μm
Unloaded resonant frequency: 400Hz
Closed/open-loop unloaded Step time: 10/1.6ms
Unloaded closed loop operating frequency: 100Hz@10% displacement
Unloaded closed loop operating frequency: 10Hz@100% displacement
Load: 1.5kg
Capacitance: 3.6μF/axis
Material: Steel, Aluminum
Mass:220g
Note:P16.XY50S/K displacement is 50μm or ±25μm
Application
• Microscopic imaging
• Surface inspection
• Interference / metering
• Precision positioning
• Optics
• Micro manipulation