P92.X40 fast tool positioning stage is driven by high-voltage piezoelectric ceramics. The driving voltage is 0~1000V and the output can reach 3000N. The fast tool positioning stage can generate one-dimensional X-direction micro-feed motion with feed range of up to 40μm and the integrated closed-loop sensor to ensure linear relationship between control voltage and displacement during operation. In addition, its mechanical structure is sturdy and equipped with heat dissipation interface.
Feature
· Travel range to 40μm
· Driving voltage: 0~1000V
· Blocking force to 3000N
· Closed loop resolution to 10m
· With heat dissipation
Technical parameter
Model:P92.X40
Travel range(0-800V):32μm
Travel range(0-1000V):40μm
Sensor:SGS
Blocking force:3000N
Stiffness in motion direction:100N/μm
Unload resonant frequency:3975Hz
Closed loop linearity:<0.1%F.S
Closed loop repeatability:<0.1%F.S
Closed loop resolution:10nm
Electrical capacitance:540nF
Material:Steel
Open loop displacement curve
Closed loop Accuracy curve
Closed loop resolution curve
Gain curve
Phase curve
Temperature rise
Operating conditions |
Temperature rise |
1KHz、1μm |
0.32℃ |
500Hz、5μm |
11.56℃ |
20W(P=U^2fC) |
45.85℃ |
1. @1kHz 1μm
2. @500Hz 5μm
3. @200Hz 400V