I. Highlights: Structure and Motion Transformation

      N55.Z10 linear piezo motor has three-part structure of "upper platform - trapezoidal wedge - base". Through the internal piezo drive, the horizontal motion of the trapezoidal slider is combined with the inclined surface, which is converted into the Z-motion of the upper platform.

      When the piezo ceramic drives the trapezoidal slider to move left and right horizontally, due to the coordination between the inclined surface of the trapezoidal slider and the upper and lower structures, the change in the position of the slider will cause the vertical distance between the upper platform and the base to change. When the trapezoidal slider moves left and right, the height difference of the inclined surface is utilized for transformation, enabling the upper platform to achieve displacement in Z-axis. This design converts horizontal movement into vertical displacement, thereby achieving a greater load capacity in Z while ensuring high-precision displacement control. By taking advantage of the geometric characteristics of the trapezoidal structure, the load pressure is dispersed, the overall rigidity is enhanced, and the load capacity is strengthened.

II. Core Performance Enhancement: Longer Travel, Larger Load

      N55.Z10 linear piezo motor stage has extended its stroke to a certain extent, as shown in Figure a. If N55.Z10 is set to the 0 position, the Z-axis displacement is 0. As shown in Figure b, when the trapezoidal slider moves to the minimum value in the negative direction of the X-axis, the Z-axis displacement reaches the minimum negative value, with a displacement of -5.5mm. As shown in Figure c, when the trapezoidal slider moves to the maximum value in the forward direction of the X-axis, the Z-axis displacement reaches the maximum positive value, with a displacement of +5.5mm. Assuming the 0-position state as the reference, under loading conditions, the N55.Z10 can achieve a flexible total displacement of 11mm in both directions along the Z-axis.

Meanwhile, due to the millimeter stroke achieved through structural transformation, it also relies on the micro-deformation of the built-in piezo ceramics. Even with a large stroke, it still maintains nanometer-level control accuracy.

      The inclined plane design of the trapezoidal structure can convert the horizontal driving force into a greater Z-direction supporting force through the decomposition of force. The Z-direction load capacity of the N55.Z10 linear piezo motor stage can be up to 1kg or more.

      The closed-loop version of N55.Z10 linear piezo motor stage is equipped with a high-precision grating sensor, which can capture the minute displacement changes of the platform in real time. In the overall stroke range of 11mm in Z, when combined with the piezoelectric drive system, a positioning accuracy of 0.2μm can be achieved, which can perfectly adapt to scientific research and high-end manufacturing scenarios with extremely high requirements for ultra-precise positioning, such as photonic device packaging and nanoimprint.

III. Scene Adaptation: Compatible with Multiple Applications

IV. Technical Data

The innovative design of the N55. Z10 has achieved multi-dimensional performance improvements of "long stroke, high precision, large load, and anti-interference", providing a more reliable precision motion control solution for high-end fields such as micro-nano processing, optical inspection, and semiconductor manufacturing.

V. Recommended Controller

      53.D1E-J small-sized piezo controller is specially designed for driving piezo motors and is suitable for driving the N55.Z10 stage. It is a single-channel closed-loop piezo controller with digital control, 24VDC power supply, static power consumption less than 5W, and TYPE-C, RS-422, and RS-232 communication interfaces. It has a compact structure with dimensions of only 105×103×30.1mm^3 , easy to integrate and operate.

      For further details, please call +86-451-86268790, or add WeChat ID: 17051647888.