In modern industry and scientific research, there is a growing demand for accurate measurements of tiny dimensions and displacements. As one of the core technologies in the field of precision measurement, capacitance micrometer is mainly used for length (depth, height, thickness, diameter, taper) measurement, vibration measurement, micro-displacement detection, etc. With its non-contact high precision and other advantages, it plays a key role in high-end manufacturing, scientific research and medical fields.
CoreMorrow Capacitive Displacement Measurement System
Capacitance micrometer is a kind of non-contact precision measuring instrument based on capacitance change principle. Its core principle is to reflect the displacement of the measured object by detecting the capacitance change between the two plates of the capacitor.
CoreMorrow capacitance micrometer consists of a capacitance sensing probe and a sensing and power supply. It can measure tiny displacements in the range of 1mm with measurement accuracy up to the nanometer level.
01
Capacitance Sensing Probe
CoreMorrow capacitance sensors are divided into two types: column and square, as shown in the following picture.
Characteristics
• Measuring range 0~ 1mm
• Measurement resolution up to 1.25nm
• Non-contact measurement, no wear
• Three-electrode structure and electric field shielding ring structure
• Measure all conductive materials
• The probe does not produce mechanical external forces on the part under test
• Active electric field shielding design
• Suitable for use in clean room and vacuum environment
• Provides higher measurement accuracy
• The electrical conductivity of the measured object does not affect the measurement
Typical Application
1.Wafer Thickness Detection: Capacitive micrometer can be used for semiconductor wafer thickness detection, non-contact measurement can avoid wafer surface wear or damage due to external stress during the detection process, capacitive sensor can accurately measure small size changes with nanoscale resolution, ensure the quality and performance of wafer manufacturing, improve yield.
2.Telescope lens positioning: Capacitive micrometer can measure the relative position and spacing between the lenses, ensuring the imaging quality of the optical system, so that the telescope can capture clearer and more distant celestial images.
3.Precision machining: In the processing of precision mechanical, capacitance micrometer can be used to measure the dimensional accuracy of parts, surface flatness and small deformation during processing.
4.Material mechanical properties test: In mechanical experiments such as material tension and compression, capacitance micrometer can accurately measure the tiny deformation of materials in the process of stress, so as to obtain the stress of materials and analyze the mechanical properties parameters of materials.
Technical Data of Capacitive Probe
Name |
Capacitive sensor |
Measuring range |
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Static resolution |
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Dynamic resolution (1kHz) |
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Linearity |
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Repeatability |
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Sensor diameter/ length |
10 or 9mm |
Minimum diameter/length of the measured surface |
10 or 9mm |
Sensor cable length |
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Probe size |
Φ10×18.5mm^3 or 13×13×4.3mm^3 |
02
Sensing Controller
According to different application requirements, CoreMorrow provides three types of controllers for capacitive sensors, they are modular multi-channel sensor controller, single-channel small volume sensor controller and board cassette sensor controller.
Sensing Control Technical Data
Product |
Capacitance sensing sensor controller |
Sensing mode |
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Channels |
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Static resolution |
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Dynamic resolution (2kHz) |
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Absolute error |
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Linearity |
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Repeatability |
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Signal temperature stability |
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Long-term stability |
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Bandwidth |
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Operating temperature |
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Storage temperature |
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Ambient humidity |
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Sensor output interface |
BNC/SMA |
Power supply |
|
E01Size(L×W×D) |
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E00Size(L×W×D) |
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E75Size(L×W×D) |
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E09Size(L×W×D) |
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For more details, please calling 0451-86268790, 17051647888(Wechat ID).