H32.TR4S/K piezo tilt/rotation stage adopts a frictionless flexible hinge structure design internally, it can achieve θx, θy deflection and θz rotation with fast response speed and high closed-loop positioning accuracy. Because of its excellent performance, it can be used as a vibration platform in the simulated vibration environment to complete high-precision and fast micro-vibration control, so as to meet the user's test and analysis of the control accuracy of precision equipment, in order to verify and improve the performance of high-end precision instruments and equipment. The product is shown in the following figure.
Characteristics
θx, θy deflection, θz rotation
Tilt angular range to 4.6mrad/axis
Resolution to 0.05μrad
Load capacity to 1kg
High closed-loop positioning accuracy
Rotation angle range to 3.2mrad, resolution to 0.05μrad
Millisecond response time
Application
Vibration test
Space disturbance simulation system
Interference/Measurement
Large load tilt motion
Technical Data
Model |
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Active axes |
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Drive control |
4 driving channels, 3 sensing channels |
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Tilt angle range(0~120V) |
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Sensor |
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Resolution |
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Closed-loop linearity |
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Closed-loop repeatability |
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Unloaded resonant frequency |
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Resonant frequency @1kg |
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El. capacitance |
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Step time |
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Load capacity |
Horizontal |
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Vertical |
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Inverted |
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Material |
Stainless steel, Alluminum |
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Mass (cable not included) |
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Recommend Controller
E70.D4 piezo controller is ideal for driving H32.TR4S piezo tilt/rotation stage. It is a four-channel piezo controller with small size, high power, low power consumption, high bandwidth and low ripple noise characteristics. It is simple and convenient with 24VDC power supply, digital communication through serial port, USB or network port, and optional open/closed loop.
For more details, please contact us by calling 0451-86268790 or 17051647888 (Wechat ID).