P60.Z1000 is a Z-motion piezo nano-positioning stage with large stroke. It use high reliability piezo ceramic to drive with frictionless flexible hinge mechanism. Mechanism amplification driving form helps the stage to achieve large stroke precision positioning movement, travel range up to 1mm. It can bear up to 1.5kg load, which means large stroke and large load at the same time. The product can be equipped with high-precision sensor for closed-loop precision positioning control. It can be widely used in optical, semiconductor, aerospace, biomedical and other fields. The product is shown in the following figure.
Characteristics
Z-axis travel to 1000μm
Load capacity 1.5kg
Millisecond response time
High accuracy of closed-loop repeatability
Optional closed loop sensor
Vacuum version available
Application
Optical measurement
Optical detection
Microscanning
Laser interferometry
Biotechnology
Nanomanipulation
Nanolithography
Nanometry
Technical Data
Model |
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Active axes |
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Drive control |
1 driving channel, 1 sensing channel |
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Travel range(0~120V) |
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Max.travel range(0~150V) |
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Sensor |
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Resolution |
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Closed-loop repeatability |
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Unloaded resonant frequency |
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Load capacity |
Horizontal |
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Vertical |
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Inverted |
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El. capacitance |
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Material |
Titanium, Aluminum |
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Mass |
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Recommend Controller
E53 piezo controller is ideal for driving P60.Z1000 piezo nanopositioning stage. It is a single-channel controller designed for small volume applications with a compact and easy integration size of 148×27.5×80mm^3, and 350g weight, 24VDC/1A power supply. It has a cooling area, which can quickly export the generated heat. The upper computer software supports secondary development .
For more details please contact us by calling 0451-86268790, 17051647888(Wechat ID).