CoreMorrow piezo screw can travel up to 26mm with a resolution of better than 20nm in the whole stroke. It has a rated load of 25N and compact design with optional vacuum version and closed-loop version, which has excellent long-term stability and maintain the set position in the case of power off. It can be used in combination with positioning slides or mirror mount to carry out linear or angular movement with characteristics of large stroke, high precision and good stability. The piezo screw motion platform is a combination of linear motor piezo screw and positioning slides, and uses the high-precision motion of piezo screw to control the movement of positioning slides, which has high stability and high precision, and realize the precision positioning of nanometer level.

N91.XYZTR4K piezo screw motion platform can achieve X, Y, Z, θx, θy, θz 6- axis motion by controlling multiple piezo screws and precision algorithm, to complete 6-axis high-precision motion control. Electronic control operation is more convenient and can achieve remote operation. It can achieve a displacement of 3mm/ axis linear motion and ±2°/ axis deflection. It is thin and easy for integration. The product is shown in the following figure.

Active axis: X, Y, Z, θx, θy, θz

Linear stroke: 3mm/ axis

Deflection stroke: ±2°/ axis

Load capacity: 1.2kg

Self-locking at rest

Closed loop version, vacuum version available

Semiconductor test

Wafer inspection

Nanoimprint

Nanometrics

Industrial precision positioning

E53.C4K-H piezo controller is specially designed for driving piezo screws and is ideal for driving N91.XYZTR4K piezo screw motion platform. It has 4 output channels for driving 4 piezo screws by upper computer software control and connected with piezo screws through the network port. It has a compact structure, very easy to integrate.

For more details please contact CoreMorrow by calling 0451-86268790, 17051647888(Wechat ID)!