


Characteristics
Motion in X
Resolution to 0.5nm
Load to 2kg
Resonant frequency to 12kHz
Millisecond response time
Custom aviation connectors
UHV version, closed loop available
Application
Interference
Microscopy/Scanning
Optical measurement
Micromachining/precision control
Metering
Technical Data
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Model |
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Active axis |
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Drive Control |
1channel driving |
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Traval range(0~120V) |
|
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Travel range(0~150V) |
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Open loop resolution |
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Unloaded resonant frequency |
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Loaded resonant frequency |
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Step time |
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El. capacitance |
|
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Working temperature |
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Load capacity |
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Material |
Stainless steel, Aluminum |
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Mass |
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Recommended Controller


