Characteristics
Motion in X
Resolution to 0.5nm
Load to 2kg
Resonant frequency to 12kHz
Millisecond response time
Custom aviation connectors
UHV version, closed loop available
Application
Interference
Microscopy/Scanning
Optical measurement
Micromachining/precision control
Metering
Technical Data
Model |
|
Active axis |
|
Drive Control |
1channel driving |
Traval range(0~120V) |
|
Travel range(0~150V) |
|
Open loop resolution |
|
Unloaded resonant frequency |
|
Loaded resonant frequency |
|
Step time |
|
El. capacitance |
|
Working temperature |
|
Load capacity |
|
Material |
Stainless steel, Aluminum |
Mass |
|
Recommended Controller