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S51 Piezo Tip/Tilt Stage Applied to Tuning Wafer Posture

Update time：2024-07-16 09:40:43Clicks：679second

Wafer posture tuning is to adjust the wafer to the correct position through the precision positioning of various dimensions to meet the various process operations on the wafer, which is widely used in wafer processing, wafer inspection and lithography technology, and plays a vital role in the application, and also has a direct impact on the manufacturing quality and performance of the chip. The larger the wafer diameter, the more semiconductor chips can be carried, and the lower the manufacturing cost will be. Therefore, in the semiconductor wafer posture tuning related applications, the demand for large multi-dimensional and large load piezoelectric motion platform is increasing day by day.

S51 Piezo Tip/Tilt Stage with Large Aperture

S51.ZT0S/K-B1 is a piezo tip/tilt stage with 3 axes motion in θx, θy and Z. Its overall size is 300×300×45.5mm^3 with a large aperture in the center. It has high closed-loop precision, fast response speed, and can carry large wafer for posture tuning. The light aperture is 200×200mm^2, which is also suitable for transmitted light applications. The product is shown as below.

Characteistics

θx θy tilt and Z motion

Closed-loop version for high accuracy

Fast response

Available UHV version

Applications

Scanning microscopy

Laser beam combination

Interference/metering

Space disturbance simulation system

Biotechnology

Mask and wafer position

Technical Data

Model	S51.ZT0S/K-B1
Active axes	θx、θy、Z
Linear travel range (0~120V)	90μm
Linear travel range (0~150V)	110μm
Tilt angle (0~120V)	±0.32mrad/axis
Tilt angle (0~150V)	±0.4mrad/axis
Sensor	SGS/-
Z axis closed/open loop resolution	10nm/3nm
Θx, θy closed/open loop resolution	0.25μrad/0.1μrad
Closed-loop linearity	0.05%F.S./-
Closed-loop repeatability	0.03%F.S./-
Push/pull force in Z axis	500N
Stiffness in Z axis	8N/μm
El. capacitance	7.2μF/axis
Load capacity	5kg
Unloaded resonant frequency	230Hz
Resonant frequency @3kg load	150Hz
Step time	40ms@3kg/10ms
Mass	5kg(cable not included）
Material	Aluminum, Steel

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S51 Piezo Tip/Tilt Stage Applied to Tuning Wafer Posture

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