S51 Piezo Tip/Tilt Stage Applied to Tuning Wafer Posture
Wafer posture tuning is to adjust the wafer to the correct position through the precision positioning of various dimensions to meet the various process operations on the wafer, which is widely used in wafer processing, wafer inspection and lithography technology, and plays a vital role in the application, and also has a direct impact on the manufacturing quality and performance of the chip. The larger the wafer diameter, the more semiconductor chips can be carried, and the lower the manufacturing cost will be. Therefore, in the semiconductor wafer posture tuning related applications, the demand for large multi-dimensional and large load piezoelectric motion platform is increasing day by day.
S51 Piezo Tip/Tilt Stage with Large Aperture
Characteistics
θx θy tilt and Z motion
Closed-loop version for high accuracy
Fast response
Available UHV version
Applications
Scanning microscopy
Laser beam combination
Interference/metering
Space disturbance simulation system
Biotechnology
Mask and wafer position
Technical Data
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Model |
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Active axes |
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Linear travel range (0~120V) |
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Linear travel range (0~150V) |
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Tilt angle (0~120V) |
±0.32mrad/axis |
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Tilt angle (0~150V) |
±0.4mrad/axis |
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Sensor |
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Z axis closed/open loop resolution |
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Θx, θy closed/open loop resolution |
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Closed-loop linearity |
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Closed-loop repeatability |
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Push/pull force in Z axis |
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Stiffness in Z axis |
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El. capacitance |
7.2μF/axis |
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Load capacity |
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Unloaded resonant frequency |
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Resonant frequency @3kg load |
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Step time |
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Mass |
5kg(cable not included） |
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Material |
Aluminum, Steel |
Recommended Controller
E70 Piezo Controller
E80.D3S-O Piezo Controller
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