X Motion, Large Load
Capacitive Sensors
Three Position for Easy Use
Application
Technical Data
Model |
XD605.X90C/K |
Active axis |
X |
Driving |
1channel driving,1channel capacitive Sensing |
Travel range(0~120V) |
76μm |
Travel range(0~150V) |
95μm |
Sensor |
CAP/- |
Resolution |
3nm |
Closed-loop linearity |
0.02%F.S./- |
Repeatability |
0.005%F.S./- |
Pitch |
<5μrad |
Yaw |
<5μrad |
Roll |
<5μrad |
Unloaded resonant frequency |
615Hz |
Resonant frequency @5kg |
310Hz |
Closed-loop unloaded step time @5kg |
8ms@20μm |
Load capacity |
Upright 10kg |
Side lying 5kg |
|
Upside down 10kg |
|
El. capacitance |
37μF |
Material |
Aluminium alloy |
Mass (Including cable) |
5.7kg |
Recommend Controller