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New Product XD605.X90 CAP Piezo Nanopositioning Stage and Closed-loop Controller

Update time：2024-02-26 09:07:47Clicks：1215second
At the beginning of the Chinese New Year, CoreMorrow starts with a new product, X-motion large-load capacitance sensing piezo nanopositioning stage -XD605.X90 as the following figure shows.
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X Motion, Large Load


XD605.X90 can achieve X linear motion, travel range up to 95μm, load can be up to 10kg, and resolution up to 3nm, providing a better solution for large load applications.


Capacitive Sensors


The closed-loop version XD605.X90 adopts capacitor sensing, linearity can be up to 0.021%F.S. and the closed-loop repeatability can be up to 0.005%F.S. Because the capacitive sensor measures the physical quantity according to the capacitance change between the two electrodes, it is not affected by temperature, magnetic field environment and other factors. There are many advantages in terms of accuracy, response speed, stability, reliability and cost.


Three Position for Easy Use


XD605.X90 has made a breakthrough in the use and placement mode, and can be used in three positions: upright, side lying and upside down, which can meet the requirements of more equipment or systems for load posture.
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Application


Microscanning, optical path adjustment, nanomanipulation technology, laser interferometry, nanolithography, biotechnology, optical communication, nanomeasurement, micromanipulation, and nanoimprint, etc.  


Technical Data



Model

XD605.X90C/K

Active axis

X

Driving

1channel driving，1channel capacitive Sensing

Travel range（0~120V）

76μm

Travel range（0~150V）

95μm

Sensor

CAP/-

Resolution

3nm

Closed-loop linearity

0.02%F.S./-

Repeatability

0.005%F.S./-

Pitch

<5μrad

Yaw

<5μrad

Roll

<5μrad

Unloaded resonant frequency

615Hz

Resonant frequency @5kg

310Hz

Closed-loop unloaded step time @5kg

8ms@20μm

Load capacity

Upright 10kg

Side lying 5kg

Upside down 10kg

El. capacitance

37μF

Material

Aluminium alloy

Mass (Including cable)

5.7kg







Recommend Controller


E53.D1C-H piezo controller is an analog and digital controller with closed-loop servo control, which was developed specifically for driving piezoelectric products with capacitive sensors. The overall dimensions are 148×125×27.5mm and the power supply is 24VDC/1.5A. The body has a cooling area for quick export of generated heat, and is small for easy integration.
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XD605.X90C Capacitance Sensing Piezo Nanopositioning Stage and E53.D1C-H Capacitor Closed-loop Controller

For more details, please contact CoreMorrow by calling 0451-86268790, 17051647888 (wechat ID)!  

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