- Introduction
- Feedback
XD106 piezo stage moves in XYZ, and is designed for cryogenic, vacuum and non-magnetic environment applications. It also features a 10mm or 50mm diameter aperture.
Characteristics
|
|
|
|
|
|
Voltage vs Travel Curve 
|
XD106.XYZ60K 
|
Applications
|
|
|
|
|
|
|
|
| Technical Data | |||
|
Type |
XD106.XYZ60K |
XD106.XYZ200K |
Units |
|
Active axes |
X、Y、Z |
X、Y、Z |
|
|
Drive control |
3 driving channels 3 sensing channels |
4 driving channels 3 sensing channels |
|
|
Driving source |
Piezo Stack |
Piezo Stack |
|
|
Driving Voltage |
0~60V@room temperature 0~150V@4K temperature |
0~150V@room temperature、100K temperature |
|
|
Nominal travel range（room temperature） |
70@60V |
XY±100/Z100@150V |
μm/axis±10% |
|
Nominal travel range（low temperature） |
30@150V @4K temperature |
XY±40/Z50@150V @100K temperature |
μm/axis±20% |
|
Aperture diameter |
10 |
50 |
mm |
|
Resolution |
2 |
2 |
nm |
|
Unloaded resonant frequency |
X415/Y465/Z497 |
XY180/Z250 |
Hz±20% |
|
Resonant frequency @200g |
XY105/Z229 |
XY140/Z200 |
Hz±20% |
|
El.capacitance |
XY5.4，Z10.9 |
XY3.6,Z7.2 |
μF±20% |
|
Material |
Titanium |
Titanium |
|
|
Load capacity |
200 |
700 |
g |
|
Mass |
220 |
1360 |
g±5% |
|
Usage direction |
Inverted |
Upright |
|
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
