XD106 Cryogenic, Vacuum, Non-Magnetic Piezo StageCurrent Location：Product Homepage >> XYZ Piezo Nanopositioner>>XD106 Cryogenic, Vacuum, Non-Magnetic Piezo Stage

Piezo Stage with Vacuum Compatible from CoreMorrow

Introduction
Feedback

XD106 piezo stage moves in XYZ, and is designed for cryogenic, vacuum and non-magnetic environment applications. It also features a 10mm or 50mm diameter aperture.

Characteristics

Low Temperature Vacuum-compatible Non-Magnetic

XYZ motion

With aperture

Open-loop motion control

Voltage vs Travel Curve

XD106.XYZ60K

Applications

Semiconductor processing	Semiconductor inspection	High precision testing and operation
Other nano motion control that requires vacuum and non-magnetic requirements, etc.

Technical Data
Type		XD106.XYZ60K	XD106.XYZ200K	Units
Active axes		X、Y、Z	X、Y、Z
Drive control		3 driving channels 3 sensing channels	4 driving channels 3 sensing channels
Driving source		Piezo Stack	Piezo Stack
Driving Voltage		0~60V@room temperature 0~150V@4K temperature	0~150V@room temperature、100K temperature
Nominal travel range（room temperature）		70@60V	XY±100/Z100@150V	μm/axis±10%
Nominal travel range（low temperature）		30@150V @4K temperature	XY±40/Z50@150V @100K temperature	μm/axis±20%
Aperture diameter		10	50	mm
Resolution		2	2	nm
Unloaded resonant frequency		X415/Y465/Z497	XY180/Z250	Hz±20%
Resonant frequency @200g		XY105/Z229	XY140/Z200	Hz±20%
El.capacitance		XY5.4，Z10.9	XY3.6,Z7.2	μF±20%
Material		Titanium	Titanium
Load capacity	Horizontal	0.2	0.7	kg
	Vertical	0.1	0.1
	Inverted	0.1	0.1
Mass		220	1360	g±5%
Usage direction		Inverted mounting	Horizontal mounting

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawings（Click on the picture to enlarge it）

Downloads
Auto CAD PDF	XD106.XYZ60K	XD106.XYZ200K
Step
Specs Sheet
Manual

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Piezo · Nano · Motion