
P79 series piezoelectric Z microscope scanner is a Z-axis micro-motion platform, mainly used for supporting macro-motion XY-axis micro-scanning stages and piezoelectric motor platforms on the market. P79 platform can perform fast Z-axis focus adjustments with milliseconds step time.
Characteristics

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XYZ version |
UHV version available |
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Applications

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| Technical Data | ||||
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Type |
P79.XYZ50S
P79.XYZ50K |
Units |
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Active axes |
X、Y、Z |
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Drive control |
3 driving channels 3 sensing channels |
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Travel range(0~120V) |
40/axis |
μm±20% |
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Max.travel range(0~150V) |
50/axis |
μm±20% |
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Sensor |
SGS/- |
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Aperture |
84×65 |
mm |
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Resolution |
1.5/0.5 |
nm |
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Linearity |
0.1/- |
%F.S. |
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Repeatability |
0.05/- |
%F.S. |
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Picth/yaw/roll |
<20 |
μrad |
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Push/pull force |
25/- |
N |
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Stiffness |
0.5 |
N/μm±20% |
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Unloaded resonant frequency |
X525/Y630/Z490 |
Hz±20% |
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Unloaded step time |
30/6 |
ms±20% |
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Load capacity |
Horizontal |
0.5 |
kg |
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Vertical |
0.05 | |||
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Inverted |
0.05 | |||
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El. capacitance |
3.2/axis |
μF±20% |
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Material |
Steel, A |
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Mass |
720 |
g±5% |
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Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; For high-reliability and long-term use, the recommended driving voltage is 0~120V.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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