Characteristics
High accuracy |
XYZ motion |
Travel to X250/Y250/Z100μm |
Aperture: 45×45mm |
Vacuum version available |
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Displacement vs Voltage Curve |
Loaded Step Time |
Technical Data | |||
Type |
P12A.XY200Z100S |
P12A.XY200Z100K |
Units |
Active axes |
X、Y、Z |
X、Y、Z |
|
Drive control |
3 driving channels 3 sensing channels |
3 driving channels 3 sensing channels |
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Travel range (0~120V) |
X200/Y200/Z80 |
X200/Y200/Z80 |
μm±10% |
Travel range (0~150V)
|
X250/Y250/Z100 |
X250/Y250/Z100 |
μm±10% |
Sensor |
SGS |
- |
|
Resolution |
XY7Z3 |
XY3/Z1 |
nm |
Linearity |
X0.1/Y0.1/Z0.2 |
- |
%F.S. |
Repeatability |
X0.05/Y0.05/Z0.1 |
- |
%F.S. |
Unloaded resonant frequency |
X240/Y240/Z150 |
X240/Y240/Z150 |
Hz±20% |
Load capacity |
500 |
500 |
g |
El. capacitance |
X7.2/Y7.2/Z1.8 |
X7.2/Y7.2/Z1.8 |
μF±20% |
Material |
Steel, Aluminum |
Steel, Aluminum |
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