- Introduction
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Characteristics
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Displacement vs Voltage Curve 
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Loaded Step Time 
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| Technical Data | ||||
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Type |
P12A.XY200Z100S |
P12A.XY200Z100K |
Units |
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Active axes |
X、Y、Z |
X、Y、Z |
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Drive control |
3 driving channels 3 sensing channels |
3 driving channels 3 sensing channels |
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Travel range (0~120V) |
X200/Y200/Z80 |
X200/Y200/Z80 |
μm±10％ |
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Max.travel range (0~150V)
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X250/Y250/Z100 |
X250/Y250/Z100 |
μm±10％ |
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Sensor |
SGS |
- |
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Resolution |
XY7Z3 |
XY3/Z1 |
nm |
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Linearity |
X0.1/Y0.1/Z0.2 |
- |
%F.S. |
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Repeatability |
X0.05/Y0.05/Z0.1 |
- |
%F.S. |
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Unloaded resonant frequency |
X240/Y240/Z150 |
X240/Y240/Z150 |
Hz±20％ |
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Load capacity |
Horizontal |
0.5 |
0.5 |
kg |
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Vertical |
0.02 | 0.02 | ||
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Inverted |
0.05 | 0.05 | ||
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El. capacitance |
X7.2/Y7.2/Z1.8 |
X7.2/Y7.2/Z1.8 |
μF±20％ |
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Material |
Steel, Aluminum |
Steel, Aluminum |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
