P12A.XY200Z100 Piezo Nanopositioning ScannersCurrent Location:Product Homepage >> XYZ Piezo Nanopositioner>>P12A.XY200Z100 Piezo Nanopositioning Scanners
  • Introduction
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Characteristics


 High accuracy 

 XYZ motion

 Travel to X250/Y250/Z100μm

 Aperture: 45×45mm

 Vacuum version available




Displacement vs Voltage Curve

Loaded Step Time

    Technical Data

Type

P12A.XY200Z100S

P12A.XY200Z100K

Units

Active axes

X、Y、Z

X、Y、Z

Drive control

3 driving channels 3 sensing channels

3 driving channels 3 sensing channels

Travel range (0~120V)

X200/Y200/Z80

X200/Y200/Z80

μm±10%

Travel range (0~150V)

X250/Y250/Z100

X250/Y250/Z100

μm±10%

Sensor

SGS

-

Resolution

XY7Z3

XY3/Z1

nm

Linearity

X0.1/Y0.1/Z0.2

-

%F.S.

Repeatability

X0.05/Y0.05/Z0.1

-

%F.S.

Unloaded resonant frequency

X240/Y240/Z150

X240/Y240/Z150

Hz±20%

Load capacity

500

500

g

El. capacitance

X7.2/Y7.2/Z1.8

X7.2/Y7.2/Z1.8

μF±20%

Material

Steel, Aluminum

Steel, Aluminum

    Drawings(Click on the picture to enlarge it)
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual

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Piezo · Nano · Motion

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