P16.XY20Z7 can achieve ±12.5μm travel in XY-axis and 8.5μm travel in Z-axis. The product is very compact and easy to integrate.
Characteristics
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Technical Data | ||||
Type |
P16.XY20Z7K |
Units |
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Active axes |
X、Y |
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Driving channels |
4 driving channels |
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Nominal travel range(0~120V) |
XY±10/Z6.8 |
µm±10% |
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Max.travel range(0~150V) |
XY±12.5/Z8.5 |
µm±10% |
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Aperture |
Ø26 |
mm |
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Resolution |
XY0.3/Z0.2 |
nm |
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Pitch/yaw/roll |
<10 |
µrad |
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Unloaded resonant frequency |
XY1700/Z1400 |
Hz±20% |
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Unloaded step time |
XY0.2/Z0.4 |
ms±20% |
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Load capacity |
Horizontal |
0.5 |
Kg |
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Vertical |
0.1 | |||
Inverted |
0.1 | |||
El. capacitance |
XY1.6/Z3.2 |
μF±20% |
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Material |
Steel, Al |
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Mass |
600 |
g±5% |
Note: Above parameters are measured with E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For high reliability and long-term use, the recommended driving voltage is 0~120V.
Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
Diagram |
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Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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