P16.XY15 Piezo Scanner is an XY axis motion scanning platform, mechanism amplification design principle, central aperture size is φ37mm, can achieve ±8μm travel in XY. It is designed specifically for imaging applications. The product is compact, easy to integrate and install.
Features
Travel to ±8μm |
Load capacity to 1kg |
Aperture:Ø37mm |
Closed loop for high accuracy |
Available UHV |
Custom is available |
Moving-part |
Applications
Image stabilization |
Microscopic imaging |
Surface inspection |
Interference/metering |
Precision positioning |
Photoelectric aiming pod |
Technical data | ||||
Models |
Suffix S-Closed loop |
P16.XY15S |
P16.XY15K |
Units |
Active axis |
X、Y |
X、Y |
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Driving channels |
3 driving channels |
3 driving channels |
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Travel range |
±6.6/axis(0~100V) |
±6.6/axis(0~100V) |
μm±10% |
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Travel range |
±8/axis(0~120V) |
±8/axis(0~120V) |
μm±10% |
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Sensor type |
SGS |
- |
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Aperture size |
Ø37 |
Ø37 |
mm |
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Resolution |
0.5 |
0.2 |
nm |
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Linearity |
0.3 |
- |
%F.S |
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Repeatability |
0.1 |
- |
%F.S |
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Pitch/yaw/roll |
<10 |
<10 |
μrad |
|
Push/pull force |
44/44 |
44/44 |
N |
|
Stiffness in motion direction |
X2.2/Y2.2 |
X2.2/Y2.2 |
N/μm±20% |
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Unloaded resonant frequency |
X1500/Y1500 |
X1500/Y1500 |
Hz±20% |
|
Unloaded step time |
1.5 |
0.7 |
ms±20% |
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El.capacitance |
1.6/axis |
1.6/axis |
μF±20% |
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Material |
Steel, Al |
Steel, Al |
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|
Mass |
235 |
235 |
g±5% |
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Load capacity |
Horizontal |
1 | 1 | kg |
Vertical |
0.2 | 0.2 | ||
Inverted |
1 | 1 |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
Diagram |
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Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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