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P16.XY15 Piezo Scanner
  • Introduction
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P16.XY15 Piezo Scanner is an XY axis motion scanning platform, mechanism amplification design principle, central aperture size is φ37mm, can achieve ±8μm travel in XY. It is designed specifically for imaging applications. The product is compact, easy to integrate and install.


Features


 Travel to ±8μm

 Load capacity to 1kg

 Aperture:Ø37mm

 Closed loop for high accuracy

 Available UHV

 Custom is available 


Moving-part


Applications


 Image stabilization

 Microscopic imaging

 Surface inspection

 Interference/metering

 Precision positioning

 Photoelectric aiming pod

    Technical data

Models

Suffix S-Closed loop
Suffix K-Open loop

P16.XY15S

P16.XY15K

Units

Active axis

XY

 XY

  Driving channels

3 driving channels
2 sensing channels

3 driving channels
2 sensing channels

 

Travel range

±6.6/axis(0~100V)

±6.6/axis(0~100V)

μm±10%

Travel range

±8/axis(0~120V)

±8/axis(0~120V)

μm±10%

Sensor type

SGS

 -


Aperture size

Ø37

Ø37

mm

Resolution

0.5

0.2

nm

Linearity

0.3

-

%F.S

Repeatability

0.1

-

%F.S

Pitch/yaw/roll

<10

<10

μrad

Push/pull force

44/44

44/44

N

Stiffness in motion direction

X2.2/Y2.2

X2.2/Y2.2

N/μm±20%

Unloaded resonant frequency

X1500/Y1500

X1500/Y1500

Hz±20%

Unloaded step time

1.5

0.7

ms±20%

El.capacitance

1.6/axis

1.6/axis

μF±20%

Material

Steel, Al

 Steel, Al


Mass

235

235

g±5%
  Load capacity
Horizontal
1 1 kg
Vertical
0.2 0.2
Inverted
1 1

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.


Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF
Step
Specs Sheet
Manual


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