- Introduction
- Feedback
P15.XYZ100S/K-C1 Piezo Nanopostioning Scanners is a threedimensional XY axis motion piezo nanopositioning stage. The stroke of each axis can reach 100 microns, and the center has a large aperture, which is very suitable for transmitted light applications.
Characteristics
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Application
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Type |
P15.XY100S-C1 |
P15.XY100K-C1 |
Units |
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Active axes |
X、Y |
X、Y |
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Driving channels |
2 driving channels |
2 driving channels |
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Travel（0~120V） |
80 |
80 |
μm±10% |
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Travel（0~150V） |
100 |
100 |
μm±10% |
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Sensor |
SGS |
- |
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Aperture |
66×66 |
66×66 |
mm |
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Size |
150×150×30 |
150×150×30 |
mm |
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Resolution |
3.5 |
1 |
nm |
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Linearity |
0.15 |
- |
%F.S. |
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Closed loop repeatability |
0.1 |
- |
%F.S. |
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Pitch/yaw/roll |
- |
- |
μrad |
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Stiffness |
- |
- |
N/μm±20% |
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Push/pull force |
- |
- |
N |
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Unloaded resonant frequency |
200 |
200 |
Hz±20% |
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Resonant frequency |
45（@60kg） |
45（@6kg） |
Hz±20% |
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Load capacity |
Upright 6/Inverted 6/Lateral 0.5 |
Upright 6/Inverted 6/Lateral 0.5 |
kg |
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El. capacitance |
10.8/axis |
10.8/axis |
μF±20% |
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Material |
Aluminum |
Aluminum |
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Mass(no cable) |
<1.1 |
<1.1 |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
