Characteristics
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Amplified-driving ![]() |
Amplified-driving P16.XY piezo scanner is used in optical path adjustment experiment with its large load and high frequency. P16 carrying mirror frame to move precisely in XY axis. ![]() |
Technical Data | ||||
Type |
S-Closed loop |
P16.XY80S |
P16.XY80K |
Units |
K-Open loop |
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Active axes |
X、Y |
X、Y |
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Driving channels |
3 driving channels |
3 driving channels |
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Travel range |
±33/axis(0~100V) |
±40/axis(0~120V) |
µm±10% |
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Max.travel range |
±40/axis(0~120V) |
±52.5/axis(0~150V) |
µm±10% |
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Sensor |
SGS |
- |
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Aperture size |
Ø43 |
Ø43 |
mm |
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Resolution |
2.5 |
1 |
nm,typ. |
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Linearity |
X0.3Y1 |
- |
%F.S. |
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Repeatability |
X0.1Y0.5 |
- |
%F.S. |
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Pitch/yaw/roll |
< 10 |
< 10 |
µrad |
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Push/pull force |
50/15 |
50/15 |
N |
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Stiffness in motion direction |
1 |
1 |
N/μm±20% |
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Unloaded step time |
5 |
1.5 |
ms±20% |
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Unloaded resonant frequency |
700 |
700 |
Hz±20% |
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Load capacity |
Horizontal |
0.5 |
0.5 |
Kg |
Vertical |
0.3 | 0.3 | ||
Inverted |
0.5 | 0.5 | ||
El. capacitance |
3.6 |
3.6 |
μF/axis±20% |
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Material |
Steel, Al |
Steel, Al |
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Mass |
470 |
470 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; For high reliability long-term use, the recommended driving voltage is 0~120V.
Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
Diagram |
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Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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