- Introduction
- Feedback
P13A piezo stage(vacuum compatible piezo stage) is specially designed for extremely low temperature and strong magnetic field. It adopts low-temperature piezo drive with light shell and is in XY scanning motion. Its volume is small and the size is only 33×33×14.6mm, with a 10×10mm through hole in the center.
All components adopt low temperature and strong magnetic compatible version to ensure its performance under low temperature and strong magnetic environment.
Characteristics
|
|
|
|
|
|
|
|
|
|
| Technical Data | ||||||||
|
Type |
P13A.XY90K |
P13A.XYZ80K |
P13A.XY180K |
Units |
||||
|
Operating temperature |
Room |
4K |
Room |
4K |
Room |
4K |
|
|
|
Active axes |
X、Y |
X、Y |
X、Y、Z |
X、Y、Z |
X、Y |
X、Y |
|
|
|
Drive control |
2 driving channels |
3 driving channels |
2 driving channels |
|
||||
|
Driving source |
Piezo Stack |
Piezo Stack |
Piezo Stack |
|
||||
|
Travel range |
90 (0~60V) |
30(0~150V) |
80（0~60V） |
25（0~150V） |
180(0~60V) |
80(0~150V) |
μm±20% |
|
|
Open-loop resolution |
1 |
0.3 |
1 |
0.3 |
2 |
1 |
nm |
|
|
Unloaded resonant |
450 |
450 |
350 |
350 |
- |
- |
Hz±20% |
|
|
Resonant |
160 |
160 |
- |
- |
- |
- |
Hz±20% |
|
|
El. capacitance |
5.5/axis |
0.75/axis |
XY5.5、Z11 |
XY0.75、Z1.5 |
12.1/axis |
1.65/axis |
μF±20% |
|
|
Mainbody |
Stainless steel |
Ti |
Stainless steel |
Ti |
Stainless steel |
Ti |
|
|
|
Wires |
Standard wire |
Phosphor Bronze Twisted Paired Wire |
Standard wire |
Phosphor Bronze Twisted Paired Wire |
Standard wire |
Phosphor Bronze Twisted Paired Wire |
|
|
|
Operating environment |
-20~80 |
Temperature to 4K, Max.magnetic field to 30T, Vacuum degree to 2E-11mbar |
-20~80 |
Temperature to 4K, Max.magnetic field to 30T, Vacuum degree to 2E-11mbar |
-20~80 |
Temperature to 4K, Max.magnetic field to 30T, Vacuum degree to 2E-11mbar |
|
|
|
Load capacity |
Horizontal |
0.15 |
0.15 |
0.2 |
0.2 |
0.2 |
0.2 |
kg |
|
Vertical |
0.1 | 0.1 | 0.05 | 0.05 | 0.05 | 0.05 | ||
|
Inverted |
0.15 | 0.15 | 0.05 | 0.05 | 0.05 | 0.05 | ||
|
Mass |
88 |
88 |
168 |
168 |
- |
- |
g±5% |
|
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
|
Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
|
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
 |
 |
 |
| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
||
|
|
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
