P13A piezo stage(vacuum compatible piezo stage) is specially designed for extremely low temperature and strong magnetic field. It adopts low-temperature piezo drive with light shell and is in XY scanning motion. Its volume is small and the size is only 33×33×14.6mm, with a 10×10mm through hole in the center.
All components adopt low temperature and strong magnetic compatible version to ensure its performance under low temperature and strong magnetic environment.
Characteristics
Low temperature 4K |
Strong magnetic resistance |
Disoplacement up to 30μm@150V at 4K |
Open-loop drive, quick response |
Resolution to 0.5nm |
Vacuum version available |
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Technical Data | |||||||
Type |
P13A.XY90K |
P13A.XYZ80K |
P13A.XY180K |
Units |
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Operating temperature |
Room |
4K |
Room |
4K |
Room |
4K |
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Active axes |
X、Y |
X、Y |
X、Y、Z |
X、Y、Z |
X、Y |
X、Y |
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Drive control |
2 driving channels |
3 driving channels |
2 driving channels |
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Driving source |
Piezo Stack |
Piezo Stack |
Piezo Stack |
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Travel range |
90 (0~60V) |
30(0~150V) |
80(0~60V) |
25(0~150V) |
180(0~60V) |
80(0~150V) |
μm±20% |
Open-loop resolution |
1 |
0.3 |
1 |
0.3 |
2 |
1 |
nm |
Unloaded resonant |
450 |
450 |
350 |
350 |
- |
- |
Hz±20% |
Resonant |
160 |
160 |
- |
- |
- |
- |
Hz±20% |
El. capacitance |
5.5/axis |
0.75/axis |
XY5.5、Z11 |
XY0.75、Z1.5 |
12.1/axis |
1.65/axis |
μF±20% |
Mainbody |
Stainless steel |
Ti |
Stainless steel |
Ti |
Stainless steel |
Ti |
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Wires |
Standard wire |
Phosphor Bronze Twisted Paired Wire |
Standard wire |
Phosphor Bronze Twisted Paired Wire |
Standard wire |
Phosphor Bronze Twisted Paired Wire |
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Operating environment |
-20~80 |
Temperature to 4K, Max.magnetic field to 30T, Vacuum degree to 2E-11mbar |
-20~80 |
Temperature to 4K, Max.magnetic field to 30T, Vacuum degree to 2E-11mbar |
-20~80 |
Temperature to 4K, Max.magnetic field to 30T, Vacuum degree to 2E-11mbar |
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Load capacity |
≤150 |
≤150 |
100 |
100 |
200 |
200 |
g |
Mass |
88 |
88 |
168 |
168 |
- |
- |
g±5% |
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