- Introduction
- Feedback
P65A.XY100S/K50 series high-resolution piezo nanopositioning stage is a nanopositioning platform that uses piezos as the driving source and a flexible hinge mechanism to achieve precision motion in the X and Y axes. Amplification mechanism drive and built in high-performance piezo actuator make it achieve displacement of 110μm/axis. Open/closed-loop versions are available for selection, vacuum versions is customizable. The closed-loop positioning accuracy of 0.004% F.S. in X,Y makes it very suitable for high-precision positioning applications.
Characteristics
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Recommended Controllers 
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| Technical Data | ||||
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Type |
S-closed loop
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P65A.XY100S50 |
P65A.XY100K50 |
Units |
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Active axes |
X、Y |
X、Y |
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Drive control |
4 driving channels |
4 driving channels |
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Nominal travel range(0~120V) |
90/axis |
90/axis |
μm±10% |
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Max. travel range(0~150V) |
110/axis |
110/axis |
μm±10% |
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Sensor type |
SGS |
- |
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| Aperture |
50×50 |
50×50 |
mm | |
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Resolution |
2.5 |
1.5 |
nm |
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Linearity |
X0.02/Y0.04 |
- |
%F.S. |
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Repeatability |
0.004 |
- |
%F.S. |
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Push/pull force |
100/10 |
100/10 |
N |
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Stiffness |
0.8 |
0.8 |
N/μm±20% |
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Unloaded resonant frequency |
X520/Y390 |
X520/Y390 |
Hz±20% |
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Resonant frequency@1kg |
X300/Y280 |
X300/Y280 |
Hz±20% |
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Step time |
40@1kg |
4 |
ms±20% |
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Load capacity |
Horizontal |
1 |
1 |
kg |
| Vertical | 1 | 1 | ||
| Inverted | 1 | 1 | ||
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El. capacitance |
6.8/axis |
6.8/axis |
μF±20% |
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Material |
Steel, Al |
Steel, Al |
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Mass(Cable included) |
600 |
600 |
g±5% |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
