P78A.Z200 piezo scanner moves in Z, its travel is up to 200μm, and it features a φ25mm aperture that is suitable for light-transmitted application.
Characteristics
Z motion, travel to 200μm |
Optional upright, lateral, inverted mounting |
Optional vacuum version |
Application
Surface inspection |
Microscopic imaging |
Optical interference |
Semiconductor processing and testing |
Vacuum environment |
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Technical Data | |||
Type |
P78A.Z200S |
P78A.Z200K |
Units |
Active axis |
Z |
Z |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Sensor |
SGS |
- |
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Travel range (0~120V) |
160 |
160 |
μm±10% |
Travel range (0~150V) |
200 |
200 |
μm±10% |
Resolution |
10 |
3 |
nm |
Linearity |
0.2 |
- |
%F.S. |
Repeatability |
0.15 |
- |
%F.S. |
Load capacity |
Upright 0.2, lateral 0.02, inverted 2 |
Upright 0.2, lateral 0.02, inverted 2 |
kg±5% |
Mass |
260 |
260 |
g±5% |
El. capacitance |
28.8 |
28.8 |
μF±20% |
Material |
Steel, Aluminum |
Steel, Aluminum |
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