P78A.Z200 piezo scanner moves in Z, its travel is up to 200μm, and it features a φ25mm aperture that is suitable for light-transmitted application.

Characteristics

Z motion, travel to 200μm

Optional upright, lateral, inverted mounting

Optional vacuum version

Application

Surface inspection	Microscopic imaging	Optical interference	Semiconductor processing and testing
Vacuum environment

Technical Data
Type		P78A.Z200S	P78A.Z200K	Units
Active axis		Z	Z
Drive control		1 driving channel 1 sensing channel	1 driving channel
Sensor		SGS	-
Travel range (0~120V)		160	160	μm±10%
Max.travel range (0~150V)		200	200	μm±10%
Resolution		10	3	nm
Linearity		0.2	-	%F.S.
Repeatability		0.15	-	%F.S.
Load capacity	Horizontal	0.2	0.2	kg
	Vertical	0.02	0.02
	Inverted	2	2
Mass		260	260	g±5%
El. capacitance		28.8	28.8	μF±20%
Material		Steel, Aluminum	Steel, Aluminum

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawing （Click on the picture to enlarge it）

3D diagram presentation

Your Contact Information：
Your Name：
Phone Number：
Tel：
E-mail：
Postcode：
(Please make sure you have given the authentic and effective contact info for us to feedback.)
Products：
Model：
Problem：
Performance Appearance Software Accessories/Parts
Description of the Feedback：
auth code： Can't see clearly?

WeChat

Sweep, get the latest information on core tomorrow