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P78A.Z200 Piezo Nanopositioning Scanners
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P78A.Z200 piezo scanner moves in Z, its travel is up to 200μm, and it features a φ25mm aperture that is suitable for light-transmitted application.


Characteristics


 Z motion, travel to 200μm

 Optional upright, lateral, inverted mounting

 Optional vacuum version


Application


 Surface inspection

 Microscopic imaging

 Optical interference

 Semiconductor processing and testing

 Vacuum environment




    Technical Data

Type

P78A.Z200S

P78A.Z200K

Units

Active axis

Z

Z

 

Drive control

1 driving channel

 1 sensing channel

1 driving channel

 

Sensor

SGS

-

 

Travel range (0~120V)

160

160

μm±10%

Travel range (0~150V)

200

200

μm±10%

Resolution

10

3

nm

Linearity

0.2

-

%F.S.

Repeatability

0.15

-

%F.S.

Load capacity

Upright 0.2, lateral 0.02, inverted 2

Upright 0.2, lateral 0.02, inverted 2

kg±5%

Mass

260

260

g±5%

El. capacitance

28.8

28.8

μF±20%

Material

Steel, Aluminum

Steel, Aluminum

    Drawing (Click on the picture to enlarge it)
Click on the picture to enlarge it
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual

    3D diagram presentation

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Piezo · Nano · Motion

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