Drawing (Click on the picture to enlarge it)

Drawing (Click on the picture to enlarge it)

Technical Data
Type	20142	Units
Active axes	X、Y
Travel range(0~150V)	10/轴	μm±20%
Unloaded resonant frequency	≥500	Hz±20%
Resonant frequency@100g load	≥200	Hz±20%
El. capacitance	1.6/轴	μF±20%
Load capacity	150	g
Response time@100g load	≤2.5	ms±20%
Material	钢、铝
Mass(with no cable)	250（不含线）	g±5%

Drawing (Click on the picture to enlarge it)

Technical Data
Type	20180	Units
Active axes	X、Y、Z
X/Y/Z travel range(0~150V)	±40/±40/15	μm±20%
Sensor	SGS
Resolution	10.7（@20mV ripple）	nm
Closed-loop linearity	0.2	%F.S.
Repeatability	0.1	%F.S.
X/Y/Z Unloaded resonant frequency	470/590/900	Hz±20%
X/Y/Z resonant frequency@120g load	300/340/600	Hz±20%
Load capacity	500	g
Step time @120g load	<30	ms±20%
X/Y/Z El. capacitance	5.4/5.4/3.6	μF±20%
Material	Steel, Aluminum

Drawing (Click on the picture to enlarge it)

Technical Data
Type	20190	Units
Active axes	X、Y
Travel range(0~150V)	200/轴	μm±20%
Unloaded resonant frequency	160	Hz±20%
Resonant frequency @ 40kg load	30	Hz±20%
El. capacitance	43.2/axis	μF±20%
Load capacity	40	kg
Material	Steel, Aluminum
Mass	4.7	kg±10%

Drawing (Click on the picture to enlarge it)

Drawing (Click on the picture to enlarge it)

Technical Data
Type	21102	Units
Active axes	X、Y
Travel range(0~150V)	15	μm±20%
Size	65x65x12	mm
Aperture	φ37	mm
Closed/open loop resolution	5/2	nm
Unloaded resonant frequency	＞ 2500	Hz±20%
Resonant frequency@150g load	＞ 1000	Hz±20%
El. capacitance	1.6/axis	μF±20%
Load capacity	200	g
Response time @150g load	<5	ms
Material	Steel
Mass(Not include cable)	<240	g±20%
Cable length	1.5	m

Drawing (Click on the picture to enlarge it)

Technical Data
Type	21125	Units
Active axes	Z
Nominal travel(0~120V)	200	μm±20%
Travel range(0~150V)	250	Hz±20%
Sensor	SGS，high accuracy
Closed-loop resolution	35@20mV	nm
Linearity	0.25	%F.S.
Repeatability	0.15	%F.S.
Unloaded resonant frequency	240	Hz±20%
Resonant frequency@2kg load	50	Hz±20%
Load capacity	2	kg
El. capacitance	18	μF±20%

Drawing (Click on the picture to enlarge it)

Technical Data
Type	22065	Units
Active axes	X、Y、Z
Travel（0~150V）	200	μm±20%
Sensor	SGS
Aperture	66×66	mm
Open/closed-loop resolution	15/20	nm
Linearity	0.2	%F.S.
Repeatability	0.1	%F.S.
Unloaded resonant frequency	195/195/240	Hz±20%
Load capacity	3	Kg
El. capacitance	14.4/14.4/28.8	μF±20%
Material	Aluminum

Drawing (Click on the picture to enlarge it)

Technical Data
Type	22071	Units
Active axes	X、Y
Travel(0~150V)	45/axis	μm±20%
Unloaded resonant frequency	X500/Y800	Hz±20%
Loaded resonant frequency@200g	X350/Y560	Hz±20%
Sensor	SGS
Closed-loop resolution	2	nm
Linearity	0.2	%F.S.
Repeatability	0.1	%F.S.
El. capacitance	14.4/axis	μF±20%
Load capacity	200	g
Material	Al

Drawing (Click on the picture to enlarge it)

Drawing (Click on the picture to enlarge it)

Technical Data
Type	22097	Units
Active axes	X、Y、Z
Sensor	SGS
Travel（0~150V）	XY1000/Z100	μm±20%
Load capacity	50	kg±5%
Closed/open-loop resolution	XY34/10，Z4/1	nm±20%
Unloaded resonant frequency	150	Hz±20%
Resonant frequency @50g load	110	Hz±20%
Linearity	0.15	%F.S
Repeatability	0.1	%F.S
El. capacitance	XY43.2/axis , Z1.8	μF±20%
Mass(no cable)	<1	kg
Material	Steel, Al

Drawing (Click on the picture to enlarge it)

Technical Data
Type	22099	Units
Active axes	Z
Sensor	SGS
Travel range(0~150V)	500	μm±20%
Load capacity	200（Upright）	g±5%
Open-loop resolution	9	nm±20%
Closed-loop resolution(@5mV ripple)	30	nm±20%
Linearity	0.15	%F.S.
Repeatability	0.1	%F.S
Mass(not include cable)	<1	kg±5%
El. capacitance	28.8	μF±20%
Material	Steel, Al

Drawing (Click on the picture to enlarge it)

Technical Data
Type	22129-2	Units
Active axes	Z
Sensor	SGS
Travel range(0~150V)	250	μm±20%
Load capacity	Upright 0.2/Lateral 0.02/Inverted 2	kg±5%
Resolution	3	nm±20%
Closed-loop resolution(@5mV ripple)	10	nm±20%
Linearity	0.2	%F.S.
Repeatability	0.15	%F.S
Mass(not include cable)	<0.3	kg±5%
El. capacitance	28.8	μF±20%
Material	Steel, Al

Drawing (Click on the picture to enlarge it)

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