- Introduction
- Feedback
P79 series piezoelectric Z microscope scanner is a Z-axis micro-motion platform, mainly used for supporting macro-motion XY-axis micro-scanning stages and piezoelectric motor platforms on the market. P79 platform can perform fast Z-axis focus adjustments with milliseconds step time.
Characteristics
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 Z version |
UHV version available |
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Applications
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| Technical Data | |||
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Type |
P79.Z200S-D1
P79.Z200K-D1 |
Units |
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Active axes |
Z |
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Drive control |
1 driving channel 1 sensing channel |
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Travel range(0~120V) |
160 |
μm±20% |
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Travel range(0~150V) |
200 |
μm±20% |
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Sensor |
SGS/- |
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Aperture |
86.5×128.5 |
mm |
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Resolution |
6/2 |
nm |
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Linearity |
0.15/- |
%F.S. |
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Repeatability |
0.1/- |
%F.S. |
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Picth/yaw/roll |
<20 |
μrad |
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Push/pull force |
- |
N |
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Stiffness |
0.2 |
N/μm±20% |
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Unloaded resonant frequency |
100 |
Hz±20% |
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Unloaded step time |
-/5 |
ms±20% |
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Load capacity |
1.5 |
μF±20% |
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El. capacitance |
21.6 |
μF±20% |
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Material |
Steel, A |
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Mass |
about 800 |
g±5% |
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Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; For high-reliability and long-term use, the recommended driving voltage is 0~120V.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
