- Introduction
- Feedback
P18 1~3 axes piezo linear scanner adopts amplified mechanism and built-in high-reliability piezo actuators, which could realize highspeed scanning up to 375μm. The aperture is Ø35mm, and various displacements and specifications are available for selection. It is suitable for long-travel multi-dimensional scanning applications.
Characteristics
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Appearance 
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Direct-driving 
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High Positioning Accuracy CoreMorrow P18.XY300 featuring large displacement, high precision and high stability is applied to nanolithography experiments . 
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Applications
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| Technical Data | ||||
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Type |
S-Closed loop |
P18.Z200S |
P18.Z200K |
Units |
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K-Open loop |
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Active axes |
Z |
Z |
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Drive control |
1 driving channel |
1 driving channel |
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Travel range(0~120V) |
160 |
160 |
µm±10% |
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Max.travel range(0~150V) |
200 |
200 |
µm±10% |
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Sensor |
SGS |
- |
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Aperture |
Ø35 |
Ø35 |
mm |
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Closed/open loop resolution |
7 |
2 |
nm，typ. |
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Closed-loop linearity |
0.2 |
- |
%F.S. |
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Repeatability |
0.15 |
- |
%F.S. |
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Pitch/yaw/roll |
<20 |
<20 |
µrad |
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Push/pull force |
50/10 |
50/10 |
N |
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Stiffness |
0.3 |
0.3 |
N/µm±20% |
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Unloaded resonant frequency |
0.3 |
0.3 |
kHz±20% |
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Closed/open-loop unloaded step time |
30 |
5 |
ms±20% |
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Load capacity |
Horizontal |
1 |
1 |
Kg |
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Vertical |
0.5 | 0.5 | ||
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Inverted |
0.5 | 0.5 | ||
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El. capacitance |
21.6 |
21.6 |
μF±20% |
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Material |
Aluminum |
Aluminum |
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Mass |
400 |
400 |
g±5% |
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Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term and high-reliable operation.
Technical data is measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Tel：0451-86268790
Piezo · Nano · Motion
