P12.X Piezo Scanners, 200μm, With Ø25 or Ø35 apertureCurrent Location:Product Homepage >> X/Z Piezo Nanopositioner>>P12.X Piezo Scanners, 200μm, With Ø25 or Ø35 aperture
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    P12.X100 is X-axis scanning stage. The aperture diameter could be selected as 25mm(35mm is optional), which is suitable for applications such as microscopy. The piezo scanner could realize single-axis displacement of 200μm. Integrated structure makes multi-dimensional motion uncoupled and could be selected in various specifications to meet the needs of different applications.


Characteristics


 X axis

 Max stroke to 200μm

 Max load to 0.5kg

 With Ø25 or Ø35 aperture


Appearance

P12.X moving part

Amplified-driving

1~3 - Axis Scanning Stage

P12 piezo nanopositioning stage is a 1~3-axis linear piezo scanning stage, including X, Z, XY, XZ, XYZ motion versions. A variety of specifications and models for choice with optional aperture diameter of 25mm or 35mm.

Freqency VS Load Curve

Application case-Inverted Piezo Scanner


Applications


 Scanning interference

 Confocal microscopy

 Wafer positioning

 Surface measurement

 Image processing and stabilization

 Optical capture



    Technical Data

Type

S-Closed loop

P12.X200S
P12.X200K

P12.X200S-D
P12.X200K-D

Units

K-Open loop

  Active axes

X

X

 

 Drive control

1 driving channel
1 sensing channel

1 driving channel
1 sensing channel

 

  Nominal travel range(0~120V)

160

160

µm±10%

  Max.travel range(0~150V)

100

100

µm±10%

  Sensor type

SGS/-

SGS/-

 

  Aperture

Ø25

Ø35

mm

  Resolution

5.5/2

5.5/2

nm

  Linearity

0.1/-

0.1/-

%F.S.

  Repeatability

0.05/-

0.05/-

%F.S.

  Pitch/yaw/roll

<15

<15

µrad

  Push/pull force

30/10

30/10

N

  Stiffness

0.2

0.2

N/µm±20%

  Unloaded resonant frequency

160

160

Hz±20%

 Step time

15/3

15/3

ms±20%

  Load capacity

Horizontal

0.5

0.5

Kg

Vertical
0.04 0.04
Inverted
0.04 0.04

  El. capacitance

3.6

3.6

μF±20%

  Material

Steel, Al

Steel, Al

 

  Mass

200

200

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. 

Technical data are measured by CoreMorrow E00/E01 series piezo controller.


Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

   P12.X200 Drawings(Click on the picture to enlarge it)
   P12.X200-D Drawings(Click on the picture to enlarge it)
    Downloads
Auto CAD PDF
Step
Specs Sheet

P12.X200

P12.X200-D

Manual
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