P18A.X200 Piezo Scanners(Amplified Drive)Current Location:Product Homepage >> X/Z Piezo Nanopositioner>>P18A.X200 Piezo Scanners(Amplified Drive)
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    P18A.X200 piezo scanner adopts amplification mechanism, flexible hinge design and high-reliability piezo actuator to realize displacement of up to 200μm in X, and could be configured with closed-loop sensor for high-precision scanning and positioning. The size of aperture is 25mm×25mm. It could realize 2 or 3 axes motion by combining multiple stages.


Characteristics


 X motion

 Max stroke to 200μm

 Aperture: 25×25mm

 Open/closed loop version optional


Loaded Step Time


Applications


 Biotechnology

 Interference

 Wafer positioning

 SPM

 Measurement

 Surface structure analysis

    Technical data

Models

S-Closed loop  

K-open loop

P18A.X200S

P18A.X200K

Units

Active axis

X

X

 

Drive control

1 driving channel
1 sensing channel

1 driving channel

 

Nominal travel range(0~120V)

160

160

µm±10%

Max.travel range(0~150 V)

200

200

µm±10%

Sensor type

SGS

-

 

Aperture

25×25

25×25

mm

Resolution

8

3

nm

Linearity

0.08

-

%F.S.

Repeatability

0.05

-

%F.S.

Step time

50@1000g

15

ms±20%

Unloaded resonant frequency

530

530

Hz±20%

Resonant frequency@1000g

140

140

Hz±20%

Pitch/yaw/roll

10

10

μrad

El.capacitance

11

11

μF±20%

Operating temperature

-20~80

-20~80

Load capacity

Horizontal
5

5

kg

Vertical
3 3
Inverted
5 5

Material

Aluminum alloy

Aluminum alloy


Mass(Cable included)

560

560

g±5%



Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF
Step
Specs Sheet
Manual



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